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Dingying Xu
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Bethlehem, PA, US
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Post chemical-mechanical planarization (CMP) cleaning composition
Patent number
6,492,308
Issue date
Dec 10, 2002
ESC, Inc.
Shahriar Naghshineh
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...