Dirk Doering

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Erfurt-Hochheim, DE

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Patents Grantslast 30 patents

Information Patent Grant
Catadioptric lens and optical system comprising such a lens
- Patent number 11,561,381
- Issue date Jan 24, 2023
- Carl Zeiss SMT GmbH
- Konstantin Forcht
- G02 - OPTICS
Information Patent Grant
Catadioptric lens and optical system comprising such a lens
- Patent number 11,520,130
- Issue date Dec 6, 2022
- Carl Zeiss SMT GmbH
- Konstantin Forcht
- G02 - OPTICS
Information Patent Grant
Lithography apparatus comprising a plurality of individually contro...
- Patent number 11,003,090
- Issue date May 11, 2021
- Carl Zeiss SMT GmbH
- Stefan Richter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical unit for a metrology system and metrology syst...
- Patent number 10,578,881
- Issue date Mar 3, 2020
- Carl Zeiss AG
- Thomas Frank
- G02 - OPTICS
Information Patent Grant
Illumination optical unit for a metrology system and metrology syst...
- Patent number 10,168,539
- Issue date Jan 1, 2019
- Carl Zeiss SMT GmbH
- Thomas Frank
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical unit for a metrology system and metrology syst...
- Patent number 9,904,060
- Issue date Feb 27, 2018
- Carl Zeiss AG
- Thomas Frank
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY APPARATUS COMPRISING A PLURALITY OF INDIVIDUALLY CONTRO...
- Publication number 20200166852
- Publication date May 28, 2020
- Carl Zeiss SMT GMBH
- Stefan Richter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CATADIOPTRIC LENS AND OPTICAL SYSTEM COMPRISING SUCH A LENS
- Publication number 20190369374
- Publication date Dec 5, 2019
- Carl Zeiss SMT GMBH
- Konstantin Forcht
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...
- Publication number 20190121145
- Publication date Apr 25, 2019
- Carl-Zeiss AG
- Thomas Frank
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...
- Publication number 20180173001
- Publication date Jun 21, 2018
- Carl-Zeiss AG
- Thomas Frank
- G02 - OPTICS
Information Patent Application
LITHOGRAPHY APPARATUS COMPRISING A PLURALITY OF INDIVIDUALLY CONTRO...
- Publication number 20170255110
- Publication date Sep 7, 2017
- Carl Zeiss SMT GMBH
- Stefan Richter
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...
- Publication number 20150001408
- Publication date Jan 1, 2015
- Carl-Zeiss AG
- Thomas Frank
- G01 - MEASURING TESTING