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Dirk Hendrikus Marinus ENGELEN
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Leende, NL
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last 30 patents
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Patent Grant
Actuator, positioning device, lithographic apparatus, and method fo...
Patent number
10,191,392
Issue date
Jan 29, 2019
ASML Netherlands B.V.
Johannes Adrianus Antonius Theodorus Dams
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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last 30 patents
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Patent Application
SEISMIC SHAKER
Publication number
20240004094
Publication date
Jan 4, 2024
SEISMIC MECHATRONICS B.V.
Johannes Adrianus Antonius Theodorus DAMS
G01 - MEASURING TESTING
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Patent Application
ACTUATOR, POSITIONING DEVICE, LITHOGRAPHIC APPARATUS, AND METHOD FO...
Publication number
20170199469
Publication date
Jul 13, 2017
ASML NETHERLANDS B.V.
Johannes Adrianus Antonius Theodorus DAMS
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER