Dirk Rothweiler

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Bangkkok, TH

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Patents Grantslast 30 patents

Information Patent Grant
EUV illumination system having a plurality of light sources for ill...
- Patent number 7,329,886
- Issue date Feb 12, 2008
- Carl Zeiss SMT AG
- Wolfgang Singer
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Illumination system with a plurality of light sources
- Patent number 7,071,476
- Issue date Jul 4, 2006
- Carl Zeiss SMT AG
- Dirk Rothweiler
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
Illumination system with a plurality of light sources
- Publication number 20040256575
- Publication date Dec 23, 2004
- Carl Zeiss SMT AG
- Wolfgang Singer
- B82 - NANO-TECHNOLOGY
Information Patent Application
Illumination system with a plurality of light sources
- Publication number 20040036037
- Publication date Feb 26, 2004
- Carl Zeiss SMT AG,
- Dirk Rothweiler
- B82 - NANO-TECHNOLOGY