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Dirk Seidel
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Jena, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for analyzing an element of a photolithography...
Patent number
12,001,145
Issue date
Jun 4, 2024
Carl Zeiss SMT GmbH
Alexander Freytag
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Autofocusing method for an imaging device
Patent number
11,947,185
Issue date
Apr 2, 2024
Carl Zeiss SMT GmbH
Dirk Seidel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for detecting an object structure and apparatus for carrying...
Patent number
11,892,769
Issue date
Feb 6, 2024
Carl Zeiss SMT GmbH
Beat Marco Mout
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for evaluating an unknown effect of defects of...
Patent number
11,774,859
Issue date
Oct 3, 2023
Carl Zeiss SMT GmbH
Alexander Freytag
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method, computer program and apparatus for determining a quality of...
Patent number
11,631,168
Issue date
Apr 18, 2023
Carl Zeiss SMT GmbH
Tom Moebert
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for determining an imaging function of a mask inspection mic...
Patent number
11,243,392
Issue date
Feb 8, 2022
Carl Zeiss SMT GmbH
Dirk Seidel
G02 - OPTICS
Information
Patent Grant
Measuring microscope for measuring masks for lithographic methods a...
Patent number
11,079,586
Issue date
Aug 3, 2021
Carl Zeiss SMT GmbH
Oliver Jäckel
G01 - MEASURING TESTING
Information
Patent Grant
Method for correcting the distortion of a first imaging optical uni...
Patent number
10,599,936
Issue date
Mar 24, 2020
Carl Zeiss SMT GmbH
Dirk Seidel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for capturing and compensating ambient effects in a measurin...
Patent number
10,585,274
Issue date
Mar 10, 2020
Carl Zeiss SMT GmbH
Dirk Seidel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for determining the position of structure elem...
Patent number
10,380,733
Issue date
Aug 13, 2019
Carl Zeiss SMT GmbH
Dirk Seidel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for determining the registration of a structure on a photoma...
Patent number
10,113,864
Issue date
Oct 30, 2018
Carl Zeiss SMT GmbH
Michael Arnz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for localizing defects on substrates
Patent number
10,108,085
Issue date
Oct 23, 2018
Carl Zeiss SMT GmbH
Jan Hendrik Peters
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining a position of a structure element on a mask...
Patent number
10,089,733
Issue date
Oct 2, 2018
Carl Zeiss SMT GmbH
Dirk Seidel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and device for determining a lateral offset of a pattern on...
Patent number
9,786,046
Issue date
Oct 10, 2017
Carl Zeiss SMT GmbH
Michael Arnz
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for ascertaining distortion properties of an optical system...
Patent number
9,785,058
Issue date
Oct 10, 2017
Carl Zeiss SMT GmbH
Dirk Seidel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining the registration of a structure on a photoma...
Patent number
9,303,975
Issue date
Apr 5, 2016
Carl Zeiss SMT GmbH
Michael Arnz
G01 - MEASURING TESTING
Information
Patent Grant
Grating-assisted autofocus device and autofocusing method for an im...
Patent number
9,297,994
Issue date
Mar 29, 2016
Carl Zeiss SMS GmbH
Sascha Perlitz
G02 - OPTICS
Information
Patent Grant
Method and apparatus for the position determination of structures o...
Patent number
8,694,929
Issue date
Apr 8, 2014
Carl Zeiss SMT GmbH
Dirk Seidel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Determination of the relative position of two structures
Patent number
8,693,805
Issue date
Apr 8, 2014
Carl Zeiss SMS GmbH
Michael Arnz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR DETERMINING THE PHASE AND/OR REFRACTIVE INDEX OF A REGIO...
Publication number
20240133805
Publication date
Apr 25, 2024
CARL ZEISS MICROSCOPY GMBH
Dirk SEIDEL
G01 - MEASURING TESTING
Information
Patent Application
Measurement Techniques for Correcting Images with Extended Depth of...
Publication number
20240029216
Publication date
Jan 25, 2024
Carl Zeiss Industrielle Messtechnik GmbH
Sören SCHMIDT
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS FOR EVALUATING AN UNKNOWN EFFECT OF DEFECTS OF...
Publication number
20230408929
Publication date
Dec 21, 2023
Carl Zeiss SMT GMBH
Alexander Freytag
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR REGISTERING STRUCTURES ON MICROLITHOGRAPHIC MASKS, COMPU...
Publication number
20230393488
Publication date
Dec 7, 2023
Carl Zeiss SMT GMBH
Dirk Seidel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR ASCERTAINING AN IMAGE OF AN OBJECT
Publication number
20230131390
Publication date
Apr 27, 2023
Carl Zeiss SMT GMBH
Christoph Husemann
G02 - OPTICS
Information
Patent Application
DEVICE AND METHOD FOR MEASURING SUBSTRATES FOR SEMICONDUCTOR LITHOG...
Publication number
20220276571
Publication date
Sep 1, 2022
Carl Zeiss SMT GMBH
Dirk Seidel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
AUTOFOCUSING METHOD FOR AN IMAGING DEVICE
Publication number
20220057598
Publication date
Feb 24, 2022
Carl Zeiss SMT GMBH
Dirk Seidel
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
METHOD AND DEVICE FOR EVALUATING A STATISTICALLY DISTRIBUTED MEASUR...
Publication number
20210158215
Publication date
May 27, 2021
Carl Zeiss SMT GMBH
Dirk Seidel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR DETECTING AN OBJECT STRUCTURE AND APPARATUS FOR CARRYING...
Publication number
20210081693
Publication date
Mar 18, 2021
Carl Zeiss SMT GMBH
Beat Marco Mout
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS FOR EVALUATING AN UNKNOWN EFFECT OF DEFECTS OF...
Publication number
20210073969
Publication date
Mar 11, 2021
Carl Zeiss SMT GMBH
Alexander Freytag
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD, COMPUTER PROGRAM AND APPARATUS FOR DETERMINING A QUALITY OF...
Publication number
20200410656
Publication date
Dec 31, 2020
Carl Zeiss SMT GMBH
Tom Moebert
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR DETERMINING AN IMAGING FUNCTION OF A MASK INSPECTION MIC...
Publication number
20200379237
Publication date
Dec 3, 2020
Carl Zeiss SMT GMBH
Dirk Seidel
G02 - OPTICS
Information
Patent Application
APPARATUS AND METHOD FOR ANALYZING AN ELEMENT OF A PHOTOLITHOGRAPHY...
Publication number
20190354019
Publication date
Nov 21, 2019
Carl Zeiss SMT GMBH
Alexander Freytag
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR CORRECTING THE DISTORTION OF A FIRST IMAGING OPTICAL UNI...
Publication number
20190026578
Publication date
Jan 24, 2019
Carl Zeiss SMT GMBH
Dirk Seidel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR CAPTURING AND COMPENSATING AMBIENT EFFECTS IN A MEASURIN...
Publication number
20190011690
Publication date
Jan 10, 2019
Carl Zeiss SMT GMBH
Dirk Seidel
G01 - MEASURING TESTING
Information
Patent Application
MEASURING MICROSCOPE FOR MEASURING MASKS FOR LITHOGRAPHIC METHODS A...
Publication number
20170269347
Publication date
Sep 21, 2017
Carl Zeiss SMT GMBH
Oliver Jäckel
G02 - OPTICS
Information
Patent Application
METHOD FOR LOCALIZING DEFECTS ON SUBSTRATES
Publication number
20170115557
Publication date
Apr 27, 2017
Carl Zeiss SMT GMBH
Jan Hendrik Peters
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR DETERMINING A POSITION OF A STRUCTURE ELEMENT ON A MASK...
Publication number
20170091921
Publication date
Mar 30, 2017
Carl Zeiss SMT GMBH
Dirk Seidel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS FOR DETERMINING THE POSITION OF STRUCTURE ELEM...
Publication number
20170018064
Publication date
Jan 19, 2017
Carl Zeiss SMT GMBH
Dirk Seidel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method For Determining The Registration Of A Structure On A Photoma...
Publication number
20160195387
Publication date
Jul 7, 2016
Carl Zeiss SMT GMBH
Michael Arnz
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND DEVICE FOR DETERMINING A LATERAL OFFSET OF A PATTERN ON...
Publication number
20160104275
Publication date
Apr 14, 2016
Carl Zeiss SMT GMBH
Michael Arnz
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR ASCERTAINING DISTORTION PROPERTIES OF AN OPTICAL SYSTEM...
Publication number
20150346608
Publication date
Dec 3, 2015
Carl Zeiss SMT GMBH
Dirk Seidel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Autofocus Device and Autofocussing Method For An Imaging Device
Publication number
20130062501
Publication date
Mar 14, 2013
CARL ZEISS SMT GMBH
Sascha Perlitz
G02 - OPTICS
Information
Patent Application
Method And Apparatus For The Position Determination Of Structures O...
Publication number
20130019212
Publication date
Jan 17, 2013
Dirk Seidel
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DETERMINATION OF THE RELATIVE POSITION OF TWO STRUCTURES
Publication number
20120121205
Publication date
May 17, 2012
CARL ZEISS SMS GMBH
Michael Arnz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method For Determining The Registration Of A Structure On A Photoma...
Publication number
20120063666
Publication date
Mar 15, 2012
Michael Arnz
G01 - MEASURING TESTING