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Dirk Stenkamp
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Essingen, DE
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last 30 patents
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Patent Grant
Examining system for the particle-optical imaging of an object, def...
Patent number
6,903,337
Issue date
Jun 7, 2005
Carl Zeiss SMT AG
Oliver Kienzle
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Examining system for the particle-optical imaging of an object, def...
Publication number
20030066961
Publication date
Apr 10, 2003
Carl Zeiss Semiconductor Mfg. Technologies AG
Oliver Kienzle
H01 - BASIC ELECTRIC ELEMENTS