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Dirk Tenholte
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Chemnitz, DE
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last 30 patents
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Patent Grant
MEMS vacuum sensor based on the friction principle
Patent number
8,186,225
Issue date
May 29, 2012
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Steffen Kurth
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
MEMS VACUUM SENSOR BASED ON THE FRICTION PRINCIPLE
Publication number
20100024562
Publication date
Feb 4, 2010
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.,
Steffen Kurth
G01 - MEASURING TESTING