Diwakar N. KEDLAYA

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods to eliminate of deposition on wafer bevel and backside
- Patent number 12,255,054
- Issue date Mar 18, 2025
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Boron concentration tunability in boron-silicon films
- Patent number 12,205,818
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Yi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for substrate support temperature control
- Patent number 12,062,567
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Boron concentration tunability in boron-silicon films
- Patent number 11,961,739
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Yi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods to reduce material surface roughness
- Patent number 11,939,674
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Yi Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas mixer to enable RPS purging
- Patent number 11,862,475
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical absorption sensor for semiconductor processing
- Patent number 11,848,178
- Issue date Dec 19, 2023
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated pedestal design for improved heat transfer and temperature u...
- Patent number 11,830,706
- Issue date Nov 28, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Faceplate having blocked center hole
- Patent number 11,814,716
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- Fang Ruan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Faceplate with edge flow control
- Patent number 11,810,764
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber components for gas delivery modulation
- Patent number 11,804,363
- Issue date Oct 31, 2023
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas delivery systems and methods
- Patent number 11,798,820
- Issue date Oct 24, 2023
- Applied Materials, Inc.
- Diwakar Kedlaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cover wafer for semiconductor processing chamber
- Patent number 11,682,544
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods to reduce material surface roughness
- Patent number 11,618,949
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Yi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lid assembly apparatus and methods for substrate processing chambers
- Patent number 11,598,004
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Hanish Kumar Panavalappil Kumarankutty
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrogen management in plasma deposited films
- Patent number 11,562,902
- Issue date Jan 24, 2023
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Controlling concentration profiles for deposited films using machin...
- Patent number 11,532,525
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Anton V Baryshnikov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple spacer patterning schemes
- Patent number 11,527,408
- Issue date Dec 13, 2022
- Applied Materials, Inc.
- Tzu-shun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Backside gas leakby for bevel deposition reduction
- Patent number 11,495,483
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for modifying photoresist profiles and tuning critical dime...
- Patent number 11,456,173
- Issue date Sep 27, 2022
- Applied Materials, Inc.
- Meenakshi Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation via pulsed RF plasma
- Patent number 11,443,919
- Issue date Sep 13, 2022
- Applied Materials, Inc.
- Krishna Nittala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing systems and methods to control process drift
- Patent number 11,430,641
- Issue date Aug 30, 2022
- Applied Materials, Inc.
- Vivien Chua
- B08 - CLEANING
Information Patent Grant
Multiple spacer patterning schemes
- Patent number 11,315,787
- Issue date Apr 26, 2022
- Applied Materials, Inc.
- Tzu-shun Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Precursor delivery system and methods related thereto
- Patent number 11,009,455
- Issue date May 18, 2021
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fiber array line generator
- Patent number 10,537,965
- Issue date Jan 21, 2020
- Applied Materials, Inc.
- Douglas E. Holmgren
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Deployment of light energy within specific spectral bands in specif...
- Patent number 10,373,823
- Issue date Aug 6, 2019
- Applied Materials, Inc.
- Swaminathan T. Srinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotating substrate laser anneal
- Patent number 10,256,005
- Issue date Apr 9, 2019
- Applied Materials, Inc.
- Joseph M. Ranish
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
BORON CONCENTRATION TUNABILITY IN BORON-SILICON FILMS
- Publication number 20250112046
- Publication date Apr 3, 2025
- Applied Materials, Inc.
- Yi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...
- Publication number 20240387190
- Publication date Nov 21, 2024
- Applied Materials, Inc.
- Guangyan Zhong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PECVD OF SIBN THIN FILMS WITH LOW LEAKAGE CURRENT
- Publication number 20240304437
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Chuanxi YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BORON CONCENTRATION TUNABILITY IN BORON-SILICON FILMS
- Publication number 20240266171
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Yi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR PRECURSOR DELIVERY AND SPLITTING FOR FAST SWITCHING
- Publication number 20240234167
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Shashank Sharma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL ABSORPTION SENSOR FOR SEMICONDUCTOR PROCESSING
- Publication number 20240079220
- Publication date Mar 7, 2024
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THROTTLE VALVE AND FORELINE CLEANING USING A MICROWAVE SOURCE
- Publication number 20230390811
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Khokan Chandra Paul
- B08 - CLEANING
Information Patent Application
METHODS TO REDUCE MATERIAL SURFACE ROUGHNESS
- Publication number 20230203652
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Yi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYDROGEN MANAGEMENT IN PLASMA DEPOSITED FILMS
- Publication number 20230146981
- Publication date May 11, 2023
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTROLLING CONCENTRATION PROFILES FOR DEPOSITED FILMS USING MACHIN...
- Publication number 20230118964
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Anton V. Baryshnikov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE SPACER PATTERNING SCHEMES
- Publication number 20230093450
- Publication date Mar 23, 2023
- Applied Materials, Inc.
- Tzu-shun YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTOR WITH INDUCTIVELY COUPLED PLASMA SOURCE
- Publication number 20230033058
- Publication date Feb 2, 2023
- Applied Materials, Inc.
- Khokan Chandra Paul
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS
- Publication number 20230023764
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- David W. GROECHEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROLLING CONCENTRATION PROFILES FOR DEPOSITED FILMS USING MACHIN...
- Publication number 20220285232
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Anton V. Baryshnikov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS TO ELIMINATE OF DEPOSITION ON WAFER BEVEL AND BACKSIDE
- Publication number 20220199373
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BACKSIDE GAS LEAKBY FOR BEVEL DEPOSITION REDUCTION
- Publication number 20220122870
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS MIXER TO ENABLE RPS PURGING
- Publication number 20220122851
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COVER WAFER FOR SEMICONDUCTOR PROCESSING CHAMBER
- Publication number 20220122822
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- B08 - CLEANING
Information Patent Application
BORON CONCENTRATION TUNABILITY IN BORON-SILICON FILMS
- Publication number 20220108892
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Yi Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR ZONE CONTROL FOR A PROCESSING CHAMBER
- Publication number 20220108891
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BEVEL BACKSIDE DEPOSITION ELIMINATION
- Publication number 20220108872
- Publication date Apr 7, 2022
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIATION SHIELD FOR REMOVING BACKSIDE DEPOSITION AT LIFT PIN LOCAT...
- Publication number 20220093371
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYDROGEN MANAGEMENT IN PLASMA DEPOSITED FILMS
- Publication number 20220020583
- Publication date Jan 20, 2022
- Applied Materials, Inc.
- Rui Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FACEPLATE WITH EDGE FLOW CONTROL
- Publication number 20210335574
- Publication date Oct 28, 2021
- Applied Materials, Inc.
- Fang Ruan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL
- Publication number 20210320027
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Zubin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS
- Publication number 20210183657
- Publication date Jun 17, 2021
- Applied Materials, Inc.
- DAVID W. GROECHEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FACEPLATE HAVING BLOCKED CENTER HOLE
- Publication number 20210156028
- Publication date May 27, 2021
- Applied Materials, Inc.
- Fang Ruan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS TO REDUCE MATERIAL SURFACE ROUGHNESS
- Publication number 20210140045
- Publication date May 13, 2021
- Applied Materials, Inc.
- Yi Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER COMPONENTS FOR GAS DELIVERY MODULATION
- Publication number 20210142984
- Publication date May 13, 2021
- Applied Materials, Inc.
- Fang Ruan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DELIVERY SYSTEMS AND METHODS
- Publication number 20210143029
- Publication date May 13, 2021
- Applied Materials, Inc.
- Diwakar Kedlaya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Diwakar N. KEDLAYA

Person

Patents Grantslast 30 patents

Methods to eliminate of deposition on wafer bevel and backside

Boron concentration tunability in boron-silicon films

Systems and methods for substrate support temperature control

Boron concentration tunability in boron-silicon films

Methods to reduce material surface roughness

Gas mixer to enable RPS purging

Optical absorption sensor for semiconductor processing

Heated pedestal design for improved heat transfer and temperature u...

Faceplate having blocked center hole

Faceplate with edge flow control

Chamber components for gas delivery modulation

Gas delivery systems and methods

Cover wafer for semiconductor processing chamber

Methods to reduce material surface roughness

Lid assembly apparatus and methods for substrate processing chambers

Hydrogen management in plasma deposited films

Controlling concentration profiles for deposited films using machin...

Multiple spacer patterning schemes

Backside gas leakby for bevel deposition reduction

Methods for modifying photoresist profiles and tuning critical dime...

Film formation via pulsed RF plasma

Processing systems and methods to control process drift

Multiple spacer patterning schemes

Precursor delivery system and methods related thereto

Fiber array line generator

Deployment of light energy within specific spectral bands in specif...

Rotating substrate laser anneal

Patents Applicationslast 30 patents

BORON CONCENTRATION TUNABILITY IN BORON-SILICON FILMS

FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...

PECVD OF SIBN THIN FILMS WITH LOW LEAKAGE CURRENT

BORON CONCENTRATION TUNABILITY IN BORON-SILICON FILMS

MODULAR PRECURSOR DELIVERY AND SPLITTING FOR FAST SWITCHING

OPTICAL ABSORPTION SENSOR FOR SEMICONDUCTOR PROCESSING

THROTTLE VALVE AND FORELINE CLEANING USING A MICROWAVE SOURCE

METHODS TO REDUCE MATERIAL SURFACE ROUGHNESS

HYDROGEN MANAGEMENT IN PLASMA DEPOSITED FILMS

CONTROLLING CONCENTRATION PROFILES FOR DEPOSITED FILMS USING MACHIN...

MULTIPLE SPACER PATTERNING SCHEMES

REACTOR WITH INDUCTIVELY COUPLED PLASMA SOURCE

SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS

CONTROLLING CONCENTRATION PROFILES FOR DEPOSITED FILMS USING MACHIN...

METHODS TO ELIMINATE OF DEPOSITION ON WAFER BEVEL AND BACKSIDE

BACKSIDE GAS LEAKBY FOR BEVEL DEPOSITION REDUCTION

GAS MIXER TO ENABLE RPS PURGING

COVER WAFER FOR SEMICONDUCTOR PROCESSING CHAMBER

BORON CONCENTRATION TUNABILITY IN BORON-SILICON FILMS

MODULAR ZONE CONTROL FOR A PROCESSING CHAMBER

BEVEL BACKSIDE DEPOSITION ELIMINATION

RADIATION SHIELD FOR REMOVING BACKSIDE DEPOSITION AT LIFT PIN LOCAT...

HYDROGEN MANAGEMENT IN PLASMA DEPOSITED FILMS

FACEPLATE WITH EDGE FLOW CONTROL

SYSTEMS AND METHODS FOR SUBSTRATE SUPPORT TEMPERATURE CONTROL

SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS

FACEPLATE HAVING BLOCKED CENTER HOLE

METHODS TO REDUCE MATERIAL SURFACE ROUGHNESS

CHAMBER COMPONENTS FOR GAS DELIVERY MODULATION

GAS DELIVERY SYSTEMS AND METHODS