Dixit Desai

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Workpiece processing apparatus with plasma and thermal processing s...
- Patent number 11,837,447
- Issue date Dec 5, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dixit Desai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control using temperature control element coupled to fa...
- Patent number 11,749,509
- Issue date Sep 5, 2023
- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
- Yorkman Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma strip tool with uniformity control
- Patent number 11,201,036
- Issue date Dec 14, 2021
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Shawming Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spacer open process by dual plasma
- Patent number 11,195,718
- Issue date Dec 7, 2021
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Tsai Wen Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus with post plasma gas injection
- Patent number 10,790,119
- Issue date Sep 29, 2020
- Mattson Technology, Inc.
- Shawming Ma
- B08 - CLEANING
Information Patent Grant
Advanced multi-workpiece processing chamber
- Patent number 9,184,072
- Issue date Nov 10, 2015
- Mattson Technology, Inc.
- Daniel J. Devine
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Multi-workpiece processing chamber
- Patent number 8,066,815
- Issue date Nov 29, 2011
- Mattson Technology, Inc.
- Daniel J. Devine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-workpiece processing chamber
- Patent number 7,276,122
- Issue date Oct 2, 2007
- Mattson Technology, Inc.
- Daniel J. Devine
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
- Publication number 20240055242
- Publication date Feb 15, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dixit Desai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature Control Using Temperature Control Element Coupled to Fa...
- Publication number 20230411125
- Publication date Dec 21, 2023
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Yorkman Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece Processing Apparatus with Plasma and Thermal Processing S...
- Publication number 20220189747
- Publication date Jun 16, 2022
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dixit Desai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Strip Tool with Multiple Gas Injection
- Publication number 20210398775
- Publication date Dec 23, 2021
- Mattson Technology, Inc.
- Shawming Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus and Methods
- Publication number 20210257196
- Publication date Aug 19, 2021
- Mattson Technology, Inc.
- Shawming Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus With Post Plasma Gas Injection
- Publication number 20210005431
- Publication date Jan 7, 2021
- Mattson Technology, Inc.
- Shawming Ma
- B08 - CLEANING
Information Patent Application
Spacer Open Process By Dual Plasma
- Publication number 20210005456
- Publication date Jan 7, 2021
- Mattson Technology, Inc.
- Tsai Wen Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Post Plasma Gas Injection In A Separation Grid
- Publication number 20200243305
- Publication date Jul 30, 2020
- Mattson Technology, Inc.
- Weimin Zeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus and Methods
- Publication number 20190198301
- Publication date Jun 27, 2019
- Mattson Technology, Inc.
- Shawming Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inductively Coupled Plasma Wafer Bevel Strip Apparatus
- Publication number 20190131112
- Publication date May 2, 2019
- Mattson Technology, Inc.
- Shawming Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Strip Tool With Multiple Gas Injection Zones
- Publication number 20180358204
- Publication date Dec 13, 2018
- Mattson Technology, Inc.
- Shawming Ma
- B08 - CLEANING
Information Patent Application
Plasma Processing Apparatus
- Publication number 20180358206
- Publication date Dec 13, 2018
- Mattson Technology, Inc.
- Shawming Ma
- B08 - CLEANING
Information Patent Application
Plasma Processing Apparatus With Post Plasma Gas Injection
- Publication number 20180358208
- Publication date Dec 13, 2018
- Mattson Technology, Inc.
- Shawming Ma
- B08 - CLEANING
Information Patent Application
Plasma Strip Tool With Uniformity Control
- Publication number 20180358210
- Publication date Dec 13, 2018
- Mattson Technology, Inc.
- Shawming Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature Control Using Temperature Control Element Coupled to Fa...
- Publication number 20180240652
- Publication date Aug 23, 2018
- Mattson Technology, Inc.
- Yorkman Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADVANCED MULTI-WORKPIECE PROCESSING CHAMBER
- Publication number 20090028761
- Publication date Jan 29, 2009
- Daniel J. Devine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Workpiece Processing Chamber
- Publication number 20070281085
- Publication date Dec 6, 2007
- Daniel J. Devine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-workpiece processing chamber
- Publication number 20050247265
- Publication date Nov 10, 2005
- Daniel J. Devine
- H01 - BASIC ELECTRIC ELEMENTS

Dixit Desai

Person

Patents Grantslast 30 patents

Workpiece processing apparatus with plasma and thermal processing s...

Temperature control using temperature control element coupled to fa...

Plasma strip tool with uniformity control

Spacer open process by dual plasma

Plasma processing apparatus with post plasma gas injection

Advanced multi-workpiece processing chamber

Multi-workpiece processing chamber

Multi-workpiece processing chamber

Patents Applicationslast 30 patents

Workpiece Processing Apparatus with Thermal Processing Systems

Temperature Control Using Temperature Control Element Coupled to Fa...

Workpiece Processing Apparatus with Plasma and Thermal Processing S...

Plasma Strip Tool with Multiple Gas Injection

Plasma Processing Apparatus and Methods

Plasma Processing Apparatus With Post Plasma Gas Injection

Spacer Open Process By Dual Plasma

Post Plasma Gas Injection In A Separation Grid

Plasma Processing Apparatus and Methods

Inductively Coupled Plasma Wafer Bevel Strip Apparatus

Plasma Strip Tool With Multiple Gas Injection Zones

Plasma Processing Apparatus

Plasma Processing Apparatus With Post Plasma Gas Injection

Plasma Strip Tool With Uniformity Control

Temperature Control Using Temperature Control Element Coupled to Fa...

ADVANCED MULTI-WORKPIECE PROCESSING CHAMBER

Multi-Workpiece Processing Chamber

Multi-workpiece processing chamber