Dmitri A. Choutov

Person

Marietta, GA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for low energy electron enhanced etching of su...
- Patent number 7,431,796
- Issue date Oct 7, 2008
- Georgia Tech Research Corporation
- Kevin P. Martin
- B08 - CLEANING
Information Patent Grant
Method and apparatus for low energy electron enhanced etching of su...
- Patent number 6,852,195
- Issue date Feb 8, 2005
- Georgia Tech Research Corporation
- Kevin P. Martin
- B08 - CLEANING
Information Patent Grant
Method and apparatus for low energy electron enhanced etching of su...
- Patent number 6,258,287
- Issue date Jul 10, 2001
- Georgia Tech Research Corporation
- Kevin P. Martin
- B08 - CLEANING
Information Patent Grant
Method and apparatus for low energy electron enhanced etching and c...
- Patent number 6,033,587
- Issue date Mar 7, 2000
- Georgia Tech Research Corporation
- Kevin P. Martin
- B08 - CLEANING
Information Patent Grant
Method and apparatus for low energy electron enhanced etching of su...
- Patent number 6,027,663
- Issue date Feb 22, 2000
- Georgia Tech Research Corporation
- Kevin P. Martin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for reducing operating voltage in gas discharg...
- Patent number 5,917,285
- Issue date Jun 29, 1999
- Georgia Tech Research Corporation
- Harry P. Gillis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for low energy electron enhanced etching of su...
- Patent number 5,882,538
- Issue date Mar 16, 1999
- Georgia Tech Research Corporation
- Kevin P. Martin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for low energy electron enhanced etching of su...
- Publication number 20010030026
- Publication date Oct 18, 2001
- Kevin P. Martin
- H01 - BASIC ELECTRIC ELEMENTS

Dmitri A. Choutov

Person

Patents Grantslast 30 patents

Method and apparatus for low energy electron enhanced etching of su...

Method and apparatus for low energy electron enhanced etching of su...

Method and apparatus for low energy electron enhanced etching of su...

Method and apparatus for low energy electron enhanced etching and c...

Method and apparatus for low energy electron enhanced etching of su...

Apparatus and method for reducing operating voltage in gas discharg...

Method and apparatus for low energy electron enhanced etching of su...

Patents Applicationslast 30 patents

Method and apparatus for low energy electron enhanced etching of su...