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Dmitri G. Starodub
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Santa Clara, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Inspection with previous step subtraction
Patent number
11,921,052
Issue date
Mar 5, 2024
KLA Corporation
Robert M. Danen
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Phase filter for enhanced defect detection in multilayer structure
Patent number
10,957,568
Issue date
Mar 23, 2021
KLA-Tencor Corporation
Robert M. Danen
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Phase filter for enhanced defect detection in multilayer structure
Patent number
10,615,067
Issue date
Apr 7, 2020
KLA-Tencor Corporation
Robert M. Danen
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
INSPECTION WITH PREVIOUS STEP SUBTRACTION
Publication number
20230316478
Publication date
Oct 5, 2023
KLA Corporation
Robert M. Danen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PHASE FILTER FOR ENHANCED DEFECT DETECTION IN MULTILAYER STRUCTURE
Publication number
20190355601
Publication date
Nov 21, 2019
KLA-Tencor Corporation
Robert M. Danen
G06 - COMPUTING CALCULATING COUNTING