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Dmitriy Viktorovich Lopaev
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Kololev, RU
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Patents Grants
last 30 patents
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Patent Grant
Imprint lithography
Patent number
8,454,849
Issue date
Jun 4, 2013
ASML Netherlands B.V.
Sander Frederik Wuister
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Lithographic apparatus comprising an electrical discharge generator...
Patent number
8,317,929
Issue date
Nov 27, 2012
ASML Netherlands B.V.
Tatyana Victorovna Rakhimova
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,872,244
Issue date
Jan 18, 2011
ASML Netherlands B.V.
Vladimir Vitalevich Ivanov
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
IMPRINT LITHOGRAPHY
Publication number
20110226735
Publication date
Sep 22, 2011
ASML NETHERLANDS B.V.
Sander Frederik Wuister
B82 - NANO-TECHNOLOGY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20090040492
Publication date
Feb 12, 2009
ASML NETHERLANDS B.V.
Vladimir Vitalevich Ivanov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithographic apparatus comprising an electrical discharge generator...
Publication number
20070062557
Publication date
Mar 22, 2007
ASML NETHERLANDS B.V.
Tatyana Victorovna Rakhimova
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY