Dmitry OPAITS

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for aligning measurement device in substrate pr...
- Patent number 10,312,121
- Issue date Jun 4, 2019
- Lam Research Corporation
- Marcus Musselman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detecting partial unclamping of a substrate from an ESC of a substr...
- Patent number 10,224,187
- Issue date Mar 5, 2019
- Lam Research Corporation
- Dmitry Opaits
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus with a spectral reflectometer for processing substrates
- Patent number 9,752,981
- Issue date Sep 5, 2017
- Lam Research Corporation
- Seonkyung Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR ALIGNING MEASUREMENT DEVICE IN SUBSTRATE PR...
- Publication number 20170287753
- Publication date Oct 5, 2017
- LAM RESEARCH CORPORATION
- Marcus Musselman
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS WITH A SPECTRAL REFLECTOMETER FOR PROCESSING SUBSTRATES
- Publication number 20160320293
- Publication date Nov 3, 2016
- LAM RESEARCH CORPORATION
- Seonkyung LEE
- G01 - MEASURING TESTING