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Dmitry Shur
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Holon, IL
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle detection system
Patent number
11,322,333
Issue date
May 3, 2022
EL-MUL TECHNOLOGIES LTD.
Dmitry Shur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle detection system
Patent number
11,031,210
Issue date
Jun 8, 2021
EL-MUL TECHNOLOGIES LTD.
Dmitry Shur
G02 - OPTICS
Information
Patent Grant
Particle detection assembly, system and method
Patent number
10,910,193
Issue date
Feb 2, 2021
EL-MUL TECHNOLOGIES LTD.
Eli Cheifetz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for lithographic mask production
Patent number
9,442,369
Issue date
Sep 13, 2016
KLA-Tencor Corporation
Dmitry Shur
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method of SEM overlay metrology
Patent number
9,214,317
Issue date
Dec 15, 2015
KLA-Tencor Corporation
Dmitry Shur
G01 - MEASURING TESTING
Information
Patent Grant
System and method for material analysis of a microscopic element
Patent number
8,546,756
Issue date
Oct 1, 2013
Applied Materials Israel, Ltd.
Dmitry Shur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High current electron beam inspection
Patent number
7,602,197
Issue date
Oct 13, 2009
Applied Materials, Israel, Ltd.
Alexander Kadyshevitch
G01 - MEASURING TESTING
Information
Patent Grant
Contact opening metrology
Patent number
7,476,875
Issue date
Jan 13, 2009
Applied Materials, Israel, Ltd.
Alexander Kadyshevitch
G01 - MEASURING TESTING
Information
Patent Grant
Specimen current mapper
Patent number
7,473,911
Issue date
Jan 6, 2009
Applied Materials, Israel, Ltd.
Alexander Kadyshevitch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contact opening metrology
Patent number
7,381,978
Issue date
Jun 3, 2008
Applied Materials, Israel, Ltd.
Alexander Kadyshevitch
G01 - MEASURING TESTING
Information
Patent Grant
Contact opening metrology
Patent number
7,279,689
Issue date
Oct 9, 2007
Applied Materials, Israel, Ltd.
Alexander Kadyshevitch
G01 - MEASURING TESTING
Information
Patent Grant
Contact opening metrology
Patent number
7,038,224
Issue date
May 2, 2006
Applied Materials, Israel, Ltd.
Alexander Kadyshevitch
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE DETECTION SYSTEM
Publication number
20210280387
Publication date
Sep 9, 2021
EL-MULTECHNOLOGIES LTD
Dmitry SHUR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE DETECTION SYSTEM
Publication number
20200312609
Publication date
Oct 1, 2020
EL-MUL TECHNOLOGIES LTD.
Dmitry SHUR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE DETECTION ASSEMBLY, SYSTEM AND METHOD
Publication number
20190259571
Publication date
Aug 22, 2019
EL-MUL TECHNOLOGIES LTD.
ELI CHEIFETZ
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method of SEM Overlay Metrology
Publication number
20140353498
Publication date
Dec 4, 2014
KLA-Tencor Corporation
Dmitry Shur
G01 - MEASURING TESTING
Information
Patent Application
SYSTEM AND METHOD FOR MATERIAL ANALYSYS OF A MICROSCOPIC ELEMENT
Publication number
20110024622
Publication date
Feb 3, 2011
Dmitry Shur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTACT OPENING METROLOGY
Publication number
20070257191
Publication date
Nov 8, 2007
Alexander Kadyshevitch
G01 - MEASURING TESTING
Information
Patent Application
High current electron beam inspection
Publication number
20070057687
Publication date
Mar 15, 2007
Alexander Kadyshevitch
G01 - MEASURING TESTING
Information
Patent Application
Contact opening metrology
Publication number
20060113471
Publication date
Jun 1, 2006
Alexander Kadyshevitch
G01 - MEASURING TESTING
Information
Patent Application
Contact opening metrology
Publication number
20050173657
Publication date
Aug 11, 2005
Applied Materials,Inc
Alexander Kadyshevitch
G01 - MEASURING TESTING
Information
Patent Application
Specimen current mapper
Publication number
20040084622
Publication date
May 6, 2004
Applied Materials Israel Ltd.
Alexander Kadyshevitch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Contact opening metrology
Publication number
20040021076
Publication date
Feb 5, 2004
Applied Materials Israel Ltd.
Alexander Kadyshevitch
G01 - MEASURING TESTING