Membership
Tour
Register
Log in
Dmitry Skvortsov
Follow
Person
San Jose, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Broadband light interferometry for focal-map generation in photomas...
Patent number
11,442,021
Issue date
Sep 13, 2022
KLA Corporation
Rui-Fang Shi
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Integration of an Optical Height Sensor in Mask Inspection Tools
Publication number
20220196572
Publication date
Jun 23, 2022
KLA Corporation
Zefram Marks
G01 - MEASURING TESTING
Information
Patent Application
Broadband Light Interferometry for Focal-Map Generation in Photomas...
Publication number
20210109030
Publication date
Apr 15, 2021
KLA Corporation
Rui-Fang Shi
G01 - MEASURING TESTING