Dmytro Chumakov

Person

Dresden, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Shrinkage of critical dimensions in a semiconductor device by selec...
- Patent number 9,070,639
- Issue date Jun 30, 2015
- GLOBALFOUNDRIES Inc.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
DRAM cell based on conductive nanochannel plate
- Patent number 9,006,906
- Issue date Apr 14, 2015
- GLOBALFOUNDRIES Inc.
- Dmytro Chumakov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Semiconductor device comprising a buried capacitor formed in the co...
- Patent number 8,946,019
- Issue date Feb 3, 2015
- GLOBALFOUNDRIES Inc.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for particles analysis in microstructure devices...
- Patent number 8,925,396
- Issue date Jan 6, 2015
- GLOBALFOUNDRIES Inc.
- Petra Hetzer
- G01 - MEASURING TESTING
Information Patent Grant
DRAM cell based on conductive nanochannel plate
- Patent number 8,785,271
- Issue date Jul 22, 2014
- GLOBALFOUNDRIES, INC.
- Dmytro Chumakov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
In-situ measurement of feature dimensions
- Patent number 8,748,199
- Issue date Jun 10, 2014
- GLOBALFOUNDRIES, INC.
- Dmytro Chumakov
- G01 - MEASURING TESTING
Information Patent Grant
Test structure for ILD void testing and contact resistance measurem...
- Patent number 8,598,579
- Issue date Dec 3, 2013
- GLOBALFOUNDRIES Inc.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask-based silicidation for FEOL defectivity reduction and yield boost
- Patent number 8,569,171
- Issue date Oct 29, 2013
- GLOBALFOUNDRIES Inc.
- Dmytro Chumakov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Shrinkage of contact elements and vias in a semiconductor device by...
- Patent number 8,563,426
- Issue date Oct 22, 2013
- GLOBALFOUNDRIES Inc.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuits having place-efficient capacitors and methods f...
- Patent number 8,546,915
- Issue date Oct 1, 2013
- GLOBLFOUNDRIES, Inc.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit fabrication methods utilizing embedded hardmask...
- Patent number 8,541,311
- Issue date Sep 24, 2013
- GLOBALFOUNDRIES, INC.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dopant marker for precise recess control
- Patent number 8,518,721
- Issue date Aug 27, 2013
- GLOBALFOUNDRIES Inc.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chip package including multiple sections for reducing chip package...
- Patent number 8,508,053
- Issue date Aug 13, 2013
- GLOBALFOUNDRIES Inc.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stress reduction in chip packaging by a stress compensation region...
- Patent number 8,497,583
- Issue date Jul 30, 2013
- GLOBALFOUNDRIES Inc.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for extracting samples after patterning of micros...
- Patent number 8,435,885
- Issue date May 7, 2013
- GLOBALFOUNDRIES, INC.
- Dmytro Chumakov
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device comprising a capacitor formed in the contact l...
- Patent number 8,420,479
- Issue date Apr 16, 2013
- GLOBALFOUNDRIES Inc.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuits having place-efficient capacitors and methods f...
- Patent number 8,236,645
- Issue date Aug 7, 2012
- GLOBALFOUNDRIES, INC.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dopant marker for precise recess control
- Patent number 8,202,739
- Issue date Jun 19, 2012
- GLOBALFOUNDRIES Inc.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for determining surface characteristics by usi...
- Patent number 7,441,446
- Issue date Oct 28, 2008
- Advanced Micro Devices, Inc.
- Dmytro Chumakov
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DRAM CELL BASED ON CONDUCTIVE NANOCHANNEL PLATE
- Publication number 20140299929
- Publication date Oct 9, 2014
- Dmytro CHUMAKOV
- B82 - NANO-TECHNOLOGY
Information Patent Application
MASK-BASED SILICIDATION FOR FEOL DEFECTIVITY REDUCTION AND YIELD BOOST
- Publication number 20130001654
- Publication date Jan 3, 2013
- GLOBALFOUNDRIES INC.
- Dmytro Chumakov
- B82 - NANO-TECHNOLOGY
Information Patent Application
DOPANT MARKER FOR PRECISE RECESS CONTROL
- Publication number 20120282712
- Publication date Nov 8, 2012
- GLOBALFOUNDRIES INC.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED CIRCUITS HAVING PLACE-EFFICIENT CAPACITORS AND METHODS F...
- Publication number 20120267763
- Publication date Oct 25, 2012
- GLOBALFOUNDRIES INC.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU MEASUREMENT OF FEATURE DIMENSIONS
- Publication number 20120270342
- Publication date Oct 25, 2012
- GLOBALFOUNDRIES INC.
- Dmytro CHUMAKOV
- G01 - MEASURING TESTING
Information Patent Application
Shrinkage of Critical Dimensions in a Semiconductor Device by Selec...
- Publication number 20120244710
- Publication date Sep 27, 2012
- GLOBALFOUNDRIES Dresden Module One Limited Liability Company & Co. KG
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOPANT MARKER FOR PRECISE RECESS CONTROL
- Publication number 20120225503
- Publication date Sep 6, 2012
- GLOBALFOUNDRIES INC.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED CIRCUITS HAVING PLACE-EFFICIENT CAPACITORS AND METHODS F...
- Publication number 20120199950
- Publication date Aug 9, 2012
- GLOBALFOUNDRIES INC.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRAM CELL BASED ON CONDUCTIVE NANOCHANNEL PLATE
- Publication number 20120193807
- Publication date Aug 2, 2012
- GLOBALFOUNDRIES INC.
- Dmytro Chumakov
- B82 - NANO-TECHNOLOGY
Information Patent Application
Shrinkage of Contact Elements and Vias in a Semiconductor Device by...
- Publication number 20120161327
- Publication date Jun 28, 2012
- GLOBALFOUNDRIES INC.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED CIRCUIT FABRICATION METHODS UTILIZING EMBEDDED HARDMASK...
- Publication number 20120164836
- Publication date Jun 28, 2012
- GLOBALFOUNDRIES INC.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOPANT MARKER FOR PRECISE RECESS CONTROL
- Publication number 20120122249
- Publication date May 17, 2012
- GLOBALFOUNDRIES INC.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Extracting Samples After Patterning of Micros...
- Publication number 20120052601
- Publication date Mar 1, 2012
- GLOBALFOUNDRIES INC.
- Dmytro Chumakov
- G01 - MEASURING TESTING
Information Patent Application
Test Structure for ILD Void Testing and Conduct Resistance Measurem...
- Publication number 20120025862
- Publication date Feb 2, 2012
- GLOBALFOUNDRIES INC.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chip Package Including Multiple Sections for Reducing Chip Package...
- Publication number 20110291298
- Publication date Dec 1, 2011
- GLOBALFOUNDRIES INC.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device Comprising a Buried Capacitor Formed in the Co...
- Publication number 20110291170
- Publication date Dec 1, 2011
- GLOBALFOUNDRIES INC.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stress Reduction in Chip Packaging by a Stress Compensation Region...
- Publication number 20110291299
- Publication date Dec 1, 2011
- GLOBALFOUNDRIES INC.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device Comprising Sophisticated Conductive Elements i...
- Publication number 20110266685
- Publication date Nov 3, 2011
- GLOBALFOUNDRIES INC.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device Comprising a Capacitor Formed in the Contact L...
- Publication number 20110241166
- Publication date Oct 6, 2011
- GLOBALFOUNDRIES INC.
- Dmytro Chumakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR PARTICLES ANALYSIS IN MICROSTRUCTURE DEVICES...
- Publication number 20100242631
- Publication date Sep 30, 2010
- Petra Hetzer
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETERMINING SURFACE CHARACTERISTICS BY USI...
- Publication number 20070044544
- Publication date Mar 1, 2007
- Dmytro Chumakov
- G01 - MEASURING TESTING

Dmytro Chumakov

Person

Patents Grantslast 30 patents

Shrinkage of critical dimensions in a semiconductor device by selec...

DRAM cell based on conductive nanochannel plate

Semiconductor device comprising a buried capacitor formed in the co...

Method and system for particles analysis in microstructure devices...

DRAM cell based on conductive nanochannel plate

In-situ measurement of feature dimensions

Test structure for ILD void testing and contact resistance measurem...

Mask-based silicidation for FEOL defectivity reduction and yield boost

Shrinkage of contact elements and vias in a semiconductor device by...

Integrated circuits having place-efficient capacitors and methods f...

Integrated circuit fabrication methods utilizing embedded hardmask...

Dopant marker for precise recess control

Chip package including multiple sections for reducing chip package...

Stress reduction in chip packaging by a stress compensation region...

Method and system for extracting samples after patterning of micros...

Semiconductor device comprising a capacitor formed in the contact l...

Integrated circuits having place-efficient capacitors and methods f...

Dopant marker for precise recess control

Method and apparatus for determining surface characteristics by usi...

Patents Applicationslast 30 patents

DRAM CELL BASED ON CONDUCTIVE NANOCHANNEL PLATE

MASK-BASED SILICIDATION FOR FEOL DEFECTIVITY REDUCTION AND YIELD BOOST

DOPANT MARKER FOR PRECISE RECESS CONTROL

INTEGRATED CIRCUITS HAVING PLACE-EFFICIENT CAPACITORS AND METHODS F...

IN-SITU MEASUREMENT OF FEATURE DIMENSIONS

Shrinkage of Critical Dimensions in a Semiconductor Device by Selec...

DOPANT MARKER FOR PRECISE RECESS CONTROL

INTEGRATED CIRCUITS HAVING PLACE-EFFICIENT CAPACITORS AND METHODS F...

DRAM CELL BASED ON CONDUCTIVE NANOCHANNEL PLATE

Shrinkage of Contact Elements and Vias in a Semiconductor Device by...

INTEGRATED CIRCUIT FABRICATION METHODS UTILIZING EMBEDDED HARDMASK...

DOPANT MARKER FOR PRECISE RECESS CONTROL

Method and System for Extracting Samples After Patterning of Micros...

Test Structure for ILD Void Testing and Conduct Resistance Measurem...

Chip Package Including Multiple Sections for Reducing Chip Package...

Semiconductor Device Comprising a Buried Capacitor Formed in the Co...

Stress Reduction in Chip Packaging by a Stress Compensation Region...

Semiconductor Device Comprising Sophisticated Conductive Elements i...

Semiconductor Device Comprising a Capacitor Formed in the Contact L...

METHOD AND SYSTEM FOR PARTICLES ANALYSIS IN MICROSTRUCTURE DEVICES...

METHOD AND APPARATUS FOR DETERMINING SURFACE CHARACTERISTICS BY USI...