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Do Hyun PARK

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  • Hwaseong-si, KR
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method of forming silicon oxycarbonitride film
    • Patent number 8,871,655
    • Issue date Oct 28, 2014
    • Tokyo Electron Limited
    • Keisuke Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD OF FORMING SILICON OXYCARBONITRIDE FILM
    • Publication number 20130164946
    • Publication date Jun 27, 2013
    • TOKYO ELECTRON LIMITED
    • Keisuke SUZUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...