Do-Hyun Seo

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Hwaseong-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method of sensing liquid leakage for lithography appa...
- Patent number 10,054,513
- Issue date Aug 21, 2018
- Samsung Electronics Co., Ltd.
- Sung-Joo Kim
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for generating extreme ultraviolet light
- Patent number 9,635,749
- Issue date Apr 25, 2017
- Samsung Electronics Co., Ltd.
- Sung-Joo Kim
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20160278195
- Publication date Sep 22, 2016
- Sung-Joo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method of Sensing Liquid Leakage for Lithography Appa...
- Publication number 20160153862
- Publication date Jun 2, 2016
- Sung-Joo Kim
- G01 - MEASURING TESTING