Do Young Kim

Person

Urbana, IL, US

People

Patents Grantslast 30 patents

Information Patent Grant
Depositing ruthenium layers in interconnect metallization
- Patent number 10,731,250
- Issue date Aug 4, 2020
- Lam Research Corporation
- Do Young Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Internal plasma grid applications for semiconductor fabrication
- Patent number 9,633,846
- Issue date Apr 25, 2017
- Lam Research Corporation
- Alex Paterson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Internal plasma grid applications for semiconductor fabrication in...
- Patent number 9,230,819
- Issue date Jan 5, 2016
- Lam Research Corporation
- Alex Paterson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal complex compositions and methods for making metal-containing...
- Patent number 8,362,220
- Issue date Jan 29, 2013
- The Board of Trustees of the University of Illinois
- Gregory S. Girolami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for coating and filling high aspect ratio recessed features
- Patent number 7,592,254
- Issue date Sep 22, 2009
- The Board of Trustees of the University of Illinois
- John R. Abelson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITING RUTHENIUM LAYERS IN INTERCONNECT METALLIZATION
- Publication number 20180347041
- Publication date Dec 6, 2018
- LAM RESEARCH CORPORATION
- Do Young Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERNAL PLASMA GRID APPLICATIONS FOR SEMICONDUCTOR FABRICATION
- Publication number 20160086795
- Publication date Mar 24, 2016
- LAM RESEARCH CORPORATION
- Alex Paterson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERNAL PLASMA GRID APPLICATIONS FOR SEMICONDUCTOR FABRICATION
- Publication number 20140302678
- Publication date Oct 9, 2014
- Alex Paterson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metal Complex Compositions and Methods for Making Metal-Containing...
- Publication number 20130129593
- Publication date May 23, 2013
- Gregory S. GIROLAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Metal Complex Compositions and Methods for Making Metal-Containing...
- Publication number 20100168404
- Publication date Jul 1, 2010
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOI
- Gregory S. Girolami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for Coating and Filling High Aspect Ratio Recessed Features
- Publication number 20070141779
- Publication date Jun 21, 2007
- The Board of Trustees of the University of lllinois
- John R. Abelson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Do Young Kim

Person

Patents Grantslast 30 patents

Depositing ruthenium layers in interconnect metallization

Internal plasma grid applications for semiconductor fabrication

Internal plasma grid applications for semiconductor fabrication in...

Metal complex compositions and methods for making metal-containing...

Methods for coating and filling high aspect ratio recessed features

Patents Applicationslast 30 patents

DEPOSITING RUTHENIUM LAYERS IN INTERCONNECT METALLIZATION

INTERNAL PLASMA GRID APPLICATIONS FOR SEMICONDUCTOR FABRICATION

INTERNAL PLASMA GRID APPLICATIONS FOR SEMICONDUCTOR FABRICATION

Metal Complex Compositions and Methods for Making Metal-Containing...

Metal Complex Compositions and Methods for Making Metal-Containing...

Methods for Coating and Filling High Aspect Ratio Recessed Features