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Dominik Jaeger
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Chur, CH
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Patents Grants
last 30 patents
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Patent Grant
Liquid sputter target
Patent number
11,952,654
Issue date
Apr 9, 2024
EVATEC AG
Dominik Jaeger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method of processing a substrate...
Patent number
11,551,950
Issue date
Jan 10, 2023
EVATEC AG
Hartmut Rohrmann
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
LIQUID SPUTTER TARGET
Publication number
20210381099
Publication date
Dec 9, 2021
Evatec AG
Dominik Jaeger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF PROCESSING A SUBSTRATE...
Publication number
20200388517
Publication date
Dec 10, 2020
Evatec AG
Hartmut Rohrmann
H01 - BASIC ELECTRIC ELEMENTS