Dominik Metzler

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College Park, MD, US

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Patents Grantslast 30 patents

Information Patent Grant
Reactor for plasma-based atomic layer etching of materials
- Patent number 9,620,382
- Issue date Apr 11, 2017
- University of Maryland, College Park
- Gottlieb S. Oehrlein
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
REACTOR FOR PLASMA-BASED ATOMIC LAYER ETCHING OF MATERIALS
- Publication number 20150162168
- Publication date Jun 11, 2015
- University of Maryland, College Park
- Gottlieb S. OEHRLEIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...