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Dominik Vaudrevange
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Aachen, DE
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last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,468,521
Issue date
Dec 23, 2008
ASML Netherlands B.V.
Derk Jan Wilfred Klunder
B82 - NANO-TECHNOLOGY
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last 30 patents
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Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070146659
Publication date
Jun 28, 2007
ASML NETHERLANDS B.V.
Derk Jan Wilfred Klunder
B82 - NANO-TECHNOLOGY