Donald W. Pettibone

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System, method and apparatus for polarization control
- Patent number 11,415,725
- Issue date Aug 16, 2022
- KLA Corporation
- Ivan Maleev
- G02 - OPTICS
Information Patent Grant
Delivery of light into a vacuum chamber using an optical fiber
- Patent number 11,302,590
- Issue date Apr 12, 2022
- KLA Corporation
- Emanuel Saerchen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple working distance height sensor using multiple wavelengths
- Patent number 11,170,971
- Issue date Nov 9, 2021
- KLA Corporation
- Donald Pettibone
- G01 - MEASURING TESTING
Information Patent Grant
System, method and apparatus for polarization control
- Patent number 10,921,488
- Issue date Feb 16, 2021
- KLA Corporation
- Ivan Maleev
- G01 - MEASURING TESTING
Information Patent Grant
Minimizing filed size to reduce unwanted stray light
- Patent number 10,739,276
- Issue date Aug 11, 2020
- KLA-Tencor Corporation
- Donald Pettibone
- G01 - MEASURING TESTING
Information Patent Grant
Dark-field inspection using a low-noise sensor
- Patent number 10,462,391
- Issue date Oct 29, 2019
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Surface defect inspection with large particle monitoring and laser...
- Patent number 10,324,045
- Issue date Jun 18, 2019
- KLA-Tencor Corporation
- Steve (Yifeng) Cui
- G01 - MEASURING TESTING
Information Patent Grant
System, method and apparatus for polarization control
- Patent number 9,995,850
- Issue date Jun 12, 2018
- KLA-Tencor Corporation
- Ivan Maleev
- G02 - OPTICS
Information Patent Grant
System and method for luminescent tag based wafer inspection
- Patent number 9,970,873
- Issue date May 15, 2018
- KLA-Tencor Corporation
- Donald Pettibone
- G01 - MEASURING TESTING
Information Patent Grant
TDI sensor in a darkfield system
- Patent number 9,891,177
- Issue date Feb 13, 2018
- KLA-Tencor Corporation
- Jijen Vazhaeparambil
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for improving wafer surface inspection sensitivity
- Patent number 9,747,670
- Issue date Aug 29, 2017
- KLA-Tencor Corporation
- Donald Pettibone
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for simultaneous dark field and phase contrast in...
- Patent number 9,726,615
- Issue date Aug 8, 2017
- KLA-Tencor Corporation
- Chuanyong Huang
- G01 - MEASURING TESTING
Information Patent Grant
Systems for simulating high NA and polarization effects in aerial i...
- Patent number 7,133,119
- Issue date Nov 7, 2006
- KLA-Tencor Technologies Corp.
- Don Pettibone
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for detecting phase defects in lithographic masks...
- Patent number 6,727,512
- Issue date Apr 27, 2004
- KLA-Tencor Technologies Corporation
- Stan Stokowski
- G01 - MEASURING TESTING
Information Patent Grant
Differential detector coupled with defocus for improved phase defec...
- Patent number 6,646,281
- Issue date Nov 11, 2003
- KLA-Tencor Corporation
- Matthias C. Krantz
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM, METHOD AND APPARATUS FOR POLARIZATION CONTROL
- Publication number 20210173122
- Publication date Jun 10, 2021
- KLA Corporation
- Ivan Maleev
- G01 - MEASURING TESTING
Information Patent Application
DELIVERY OF LIGHT INTO A VACUUM CHAMBER USING AN OPTICAL FIBER
- Publication number 20200266116
- Publication date Aug 20, 2020
- KLA Corporation
- Emanuel Saerchen
- G01 - MEASURING TESTING
Information Patent Application
SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DE...
- Publication number 20200132608
- Publication date Apr 30, 2020
- KLA Corporation
- Raymond Chu
- G02 - OPTICS
Information Patent Application
Multiple Working Distance Height Sensor Using Multiple Wavelengths
- Publication number 20200035451
- Publication date Jan 30, 2020
- KLA-Tencor Corporation
- Donald Pettibone
- G01 - MEASURING TESTING
Information Patent Application
Minimizing Field Size to Reduce Unwanted Stray Light
- Publication number 20190137411
- Publication date May 9, 2019
- KLA-Tencor Corporation
- Donald Pettibone
- G01 - MEASURING TESTING
Information Patent Application
System, Method and Apparatus For Polarization Control
- Publication number 20180292574
- Publication date Oct 11, 2018
- KLA-Tencor Corporation
- Ivan Maleev
- G02 - OPTICS
Information Patent Application
Surface Defect Inspection With Large Particle Monitoring And Laser...
- Publication number 20180038803
- Publication date Feb 8, 2018
- KLA-Tencor Corporation
- Steve (Yifeng) Cui
- G01 - MEASURING TESTING
Information Patent Application
Dark-Field Inspection Using A Low-Noise Sensor
- Publication number 20170048467
- Publication date Feb 16, 2017
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- G01 - MEASURING TESTING
Information Patent Application
TDI Sensor in a Darkfield System
- Publication number 20160097727
- Publication date Apr 7, 2016
- KLA-Tencor Corporation
- Jijen Vazhaeparambil
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Simultaneous Dark Field and Phase Contrast In...
- Publication number 20160025645
- Publication date Jan 28, 2016
- KLA-Tencor Corporation
- Chuanyong Huang
- G01 - MEASURING TESTING
Information Patent Application
Method And System For Improving Wafer Surface Inspection Sensitivity
- Publication number 20150003721
- Publication date Jan 1, 2015
- KLA-Tencor Corporation
- Donald Pettibone
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System, Method and Apparatus For Polarization Control
- Publication number 20140361152
- Publication date Dec 11, 2014
- Ivan Maleev
- G02 - OPTICS
Information Patent Application
Method and system for detecting phase defects in lithographic masks...
- Publication number 20040016897
- Publication date Jan 29, 2004
- KLA-Tencor Technologies Corporation
- Stan Stokowski
- G01 - MEASURING TESTING

Donald W. Pettibone

Person

Patents Grantslast 30 patents

System, method and apparatus for polarization control

Delivery of light into a vacuum chamber using an optical fiber

Multiple working distance height sensor using multiple wavelengths

System, method and apparatus for polarization control

Minimizing filed size to reduce unwanted stray light

Dark-field inspection using a low-noise sensor

Surface defect inspection with large particle monitoring and laser...

System, method and apparatus for polarization control

System and method for luminescent tag based wafer inspection

TDI sensor in a darkfield system

Method and system for improving wafer surface inspection sensitivity

System and method for simultaneous dark field and phase contrast in...

Systems for simulating high NA and polarization effects in aerial i...

Method and system for detecting phase defects in lithographic masks...

Differential detector coupled with defocus for improved phase defec...

Patents Applicationslast 30 patents

SYSTEM, METHOD AND APPARATUS FOR POLARIZATION CONTROL

DELIVERY OF LIGHT INTO A VACUUM CHAMBER USING AN OPTICAL FIBER

SCANNING DIFFERENTIAL INTERFERENCE CONTRAST IN AN IMAGING SYSTEM DE...

Multiple Working Distance Height Sensor Using Multiple Wavelengths

Minimizing Field Size to Reduce Unwanted Stray Light

System, Method and Apparatus For Polarization Control

Surface Defect Inspection With Large Particle Monitoring And Laser...

Dark-Field Inspection Using A Low-Noise Sensor

TDI Sensor in a Darkfield System

System and Method for Simultaneous Dark Field and Phase Contrast In...

Method And System For Improving Wafer Surface Inspection Sensitivity

System, Method and Apparatus For Polarization Control

Method and system for detecting phase defects in lithographic masks...