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Phoenix, AZ, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods for depositing a transition metal nitride film on a substra...
Patent number
11,976,361
Issue date
May 7, 2024
ASM IP Holding B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for treatment of deposition reactor
Patent number
11,967,488
Issue date
Apr 23, 2024
ASM IP Holding B.V.
Suvi Haukka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for depositing a material film on a substrate within a react...
Patent number
11,501,973
Issue date
Nov 15, 2022
ASM IP Holding B.V.
Petri Raisanen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for depositing a transition metal nitride film on a substra...
Patent number
11,306,395
Issue date
Apr 19, 2022
ASM IP Holding B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a doped metal carbide film on a substrate and rel...
Patent number
11,056,567
Issue date
Jul 6, 2021
ASM IP Holding B.V.
Dong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for depositing a material film on a substrate within a react...
Patent number
10,872,771
Issue date
Dec 22, 2020
ASM IP Holding B.V.
Petri Raisanen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition of metal carbide films using aluminum hydro...
Patent number
9,631,272
Issue date
Apr 25, 2017
ASM America, Inc.
Dong Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Silane and borane treatments for titanium carbide films
Patent number
9,583,348
Issue date
Feb 28, 2017
ASM IP Holding B.V.
Jerry Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma-enhanced atomic layer deposition of conductive material over...
Patent number
9,466,574
Issue date
Oct 11, 2016
ASM America, Inc.
Robert B. Milligan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Silane and borane treatments for titanium carbide films
Patent number
9,236,247
Issue date
Jan 12, 2016
ASM IP Holding B.V.
Jerry Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for treatment of deposition reactor
Patent number
9,228,259
Issue date
Jan 5, 2016
ASM IP Holding B.V.
Suvi Haukka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Silane and borane treatments for titanium carbide films
Patent number
8,841,182
Issue date
Sep 23, 2014
ASM IP Holding B.V.
Jerry Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition of ruthenium or ruthenium dioxide
Patent number
8,329,569
Issue date
Dec 11, 2012
ASM America, Inc.
Dong Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma-enhanced pulsed deposition of metal carbide films
Patent number
7,666,474
Issue date
Feb 23, 2010
ASM America, Inc.
Dong Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD, SYSTEM AND APPARATUS FOR SURFACE MODIFICATION
Publication number
20240371662
Publication date
Nov 7, 2024
ASM IP HOLDING B.V.
Rajkumar Jakkaraju
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR TREATMENT OF DEPOSITION REACTOR
Publication number
20240014012
Publication date
Jan 11, 2024
ASM IP HOLDING B.V.
Suvi Haukka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR DEPOSITION OF MOLYBDENUM FOR SOURCE/DRAIN C...
Publication number
20230298902
Publication date
Sep 21, 2023
ASM IP HOLDING B.V.
Jiyeon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE AND DEVICE INCLUDING METAL CARBON NITRIDE LAYER AND METHO...
Publication number
20230238243
Publication date
Jul 27, 2023
ASM IP HOLDING B.V.
Mojtaba Samiee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR TREATMENT OF DEPOSITION REACTOR
Publication number
20230230813
Publication date
Jul 20, 2023
ASM IP HOLDING B.V.
Suvi Haukka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS AND METHODS FOR CLEANING AND TREATING A SURFACE OF A SUBSTRATE
Publication number
20230215763
Publication date
Jul 6, 2023
ASM IP HOLDING B.V.
YoungChol Byun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METAL-ON-METAL DEPOSITION METHODS FOR FILLING A GAP FEATURE ON A SU...
Publication number
20230160057
Publication date
May 25, 2023
ASM IP HOLDING B.V.
Jiyeon Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METAL-ON-METAL DEPOSITION METHODS FOR FILLING A GAP FEATURE ON A SU...
Publication number
20230163028
Publication date
May 25, 2023
ASM IP HOLDING B.V.
Salvatore Luiso
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR TREATMENT OF DEPOSITION REACTOR
Publication number
20220277937
Publication date
Sep 1, 2022
ASM IP HOLDING B.V.
Suvi Haukka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS FOR DEPOSITING A TRANSITION METAL NITRIDE FILM ON A SUBSTRA...
Publication number
20220228264
Publication date
Jul 21, 2022
ASM IP HOLDING B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS FOR DEPOSITING A TITANIUM ALUMINUM CARBIDE FILM STRUCTURE O...
Publication number
20220051895
Publication date
Feb 17, 2022
ASM IP HOLDING B.V.
Petri Raisanen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING A DOPED METAL CARBIDE FILM ON A SUBSTRATE AND RE...
Publication number
20210328036
Publication date
Oct 21, 2021
ASM IP HOLDING B.V.
Dong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DEPOSITING A MATERIAL FILM ON A SUBSTRATE WITHIN A REACT...
Publication number
20210066084
Publication date
Mar 4, 2021
ASM IP HOLDING B.V.
Petri Raisanen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING A DOPED METAL CARBIDE FILM ON A SUBSTRATE AND REL...
Publication number
20190348515
Publication date
Nov 14, 2019
ASM IP HOLDING B.V.
Dong Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DEPOSITING A MATERIAL FILM ON A SUBSTRATE WITHIN A REACT...
Publication number
20190221433
Publication date
Jul 18, 2019
ASM IP HOLDING B.V.
Petri Raisanen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS FOR DEPOSITING A TRANSITION METAL NITRIDE FILM ON A SUBSTRA...
Publication number
20190003052
Publication date
Jan 3, 2019
ASM IP HOLDING B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SILANE AND BORANE TREATMENTS FOR TITANIUM CARBIDE FILMS
Publication number
20170154778
Publication date
Jun 1, 2017
ASM IP HOLDING B.V.
Jerry Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM FOR TREATMENT OF DEPOSITION REACTOR
Publication number
20160376700
Publication date
Dec 29, 2016
ASM IP HOLDING B.V.
Suvi Haukka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SILANE AND BORANE TREATMENTS FOR TITANIUM CARBIDE FILMS
Publication number
20160196977
Publication date
Jul 7, 2016
ASM IP HOLDING B.V.
Jerry Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR TREATMENT OF DEPOSITION REACTOR
Publication number
20160115590
Publication date
Apr 28, 2016
ASM IP HOLDING B.V.
Suvi Haukka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SILANE AND BORANE TREATMENTS FOR TITANIUM CARBIDE FILMS
Publication number
20150179440
Publication date
Jun 25, 2015
ASM IP HOLDING B.V.
Jerry Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SILANE AND BORANE TREATMENTS FOR TITANIUM CARBIDE FILMS
Publication number
20140273510
Publication date
Sep 18, 2014
Jerry Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR TREATMENT OF DEPOSITION REACTOR
Publication number
20140220247
Publication date
Aug 7, 2014
ASM IP HOLDING B.V.
Suvi Haukka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION OF METAL CARBIDE FILMS USING ALUMINUM HYDRO...
Publication number
20140127405
Publication date
May 8, 2014
ASM AMERICA, INC
Dong Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA-ENHANCED ATOMIC LAYER DEPOSITION OF CONDUCTIVE MATERIAL OVER...
Publication number
20140008803
Publication date
Jan 9, 2014
ASM AMERICA, INC
Robert B. Milligan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TERNARY METAL ALLOYS WITH TUNABLE STOICHIOMETRIES
Publication number
20120100308
Publication date
Apr 26, 2012
ASM AMERICA, INC
Robert B. Milligan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEPOSITION OF RUTHENIUM OR RUTHENIUM DIOXIDE
Publication number
20110027977
Publication date
Feb 3, 2011
ASM AMERICA, INC
Dong Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA-ENHANCED ATOMIC LAYER DEPOSITION OF CONDUCTIVE MATERIAL OVER...
Publication number
20100193955
Publication date
Aug 5, 2010
ASM AMERICA, INC
Robert B. Milligan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION OF METAL CARBIDE FILMS USING ALUMINUM HYDRO...
Publication number
20090315093
Publication date
Dec 24, 2009
ASM AMERICA, INC
Dong LI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA-ENHANCED PULSED DEPOSITION OF METAL CARBIDE FILMS
Publication number
20090280267
Publication date
Nov 12, 2009
ASM AMERICA, INC
Dong Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...