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West Linn, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
PECVD apparatus for in-situ deposition of film stacks
Patent number
11,746,420
Issue date
Sep 5, 2023
Novellus Systems, Inc.
Pramod Subramonium
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
PECVD apparatus for in-situ deposition of film stacks
Patent number
10,214,816
Issue date
Feb 26, 2019
Novellus Systems, Inc.
Jason Dirk Haverkamp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Post-deposition soft annealing
Patent number
9,165,788
Issue date
Oct 20, 2015
Novellus Systems, Inc.
Keith Fox
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
In-situ deposition of film stacks
Patent number
9,028,924
Issue date
May 12, 2015
Novellus Systems, Inc.
Jason Haverkamp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tensile stressed doped amorphous silicon
Patent number
8,895,415
Issue date
Nov 25, 2014
Novellus Systems, Inc.
Keith Fox
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ deposition of film stacks
Patent number
8,741,394
Issue date
Jun 3, 2014
Novellus Systems, Inc.
Jason Haverkamp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Smooth silicon-containing films
Patent number
8,709,551
Issue date
Apr 29, 2014
Novellus Systems, Inc.
Keith Fox
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for producing low-k carbon doped oxide films with low resid...
Patent number
7,781,351
Issue date
Aug 24, 2010
Novellus Systems, Inc.
Qingguo Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for producing low-k CDO films with low residual stress
Patent number
7,390,537
Issue date
Jun 24, 2008
Novellus Systems, Inc.
Qingguo Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for improving the cracking resistance of low-k dielectric m...
Patent number
7,381,662
Issue date
Jun 3, 2008
Novellus Systems, Inc.
Dong Niu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for improving integration performance of low stress CDO films
Patent number
7,326,444
Issue date
Feb 5, 2008
Novellus Systems, Inc.
Qingguo Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for improving the cracking resistance of low-k dielectric m...
Patent number
7,094,713
Issue date
Aug 22, 2006
Novellus Systems, Inc.
Dong Niu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS
Publication number
20230366094
Publication date
Nov 16, 2023
Novellus Systems, Inc.
Jason Dirk Haverkamp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER PLACEMENT CORRECTION IN INDEXED MULTI-STATION PROCESSING CHAM...
Publication number
20220172967
Publication date
Jun 2, 2022
LAM RESEARCH CORPORATION
Stephen Topping
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS
Publication number
20190376186
Publication date
Dec 12, 2019
Novellus Systems, Inc.
Jason Dirk Haverkamp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IN-SITU DEPOSITION OF FILM STACKS
Publication number
20150013607
Publication date
Jan 15, 2015
Novellus Systems, Inc.
Jason Dirk Haverkamp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TENSILE STRESSED DOPED AMORPHOUS SILICON
Publication number
20140357064
Publication date
Dec 4, 2014
Keith Fox
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POST-DEPOSITION SOFT ANNEALING
Publication number
20130267081
Publication date
Oct 10, 2013
Keith Fox
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IN-SITU DEPOSITION OF FILM STACKS
Publication number
20130171834
Publication date
Jul 4, 2013
Jason Haverkamp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SILICON NITRIDE FILMS FOR SEMICONDUCTOR DEVICE APPLICATIONS
Publication number
20130157466
Publication date
Jun 20, 2013
Keith Fox
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
In-Situ Deposition of Film Stacks
Publication number
20110236594
Publication date
Sep 29, 2011
Jason Haverkamp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Smooth Silicon-Containing Films
Publication number
20110236600
Publication date
Sep 29, 2011
Keith Fox
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...