Dong-Soo Lim

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Ichon-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Plasma etching chamber and plasma etching system using same
- Patent number 7,615,131
- Issue date Nov 10, 2009
- SOSUL Co., Ltd.
- Dong-Soo Lim
- H01 - BASIC ELECTRIC ELEMENTS