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Dong Woo PAENG
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Albany, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Atomic layer etch and deposition processing systems including a len...
Patent number
11,984,330
Issue date
May 14, 2024
Lam Research Corporation
Dong Woo Paeng
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Isotropic etching of film with atomic layer control
Patent number
10,224,212
Issue date
Mar 5, 2019
Lam Research Corporation
Yunsang Kim
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA DISCHARGE UNIFORMITY CONTROL USING MAGNETIC FIELDS
Publication number
20230260768
Publication date
Aug 17, 2023
LAM RESEARCH CORPORATION
Theodoros Panagopoulos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL ATOMIC LAYER ETCH AND DEPOSITION APPARATUSES AND PROCESSES WI...
Publication number
20220084838
Publication date
Mar 17, 2022
He ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOMIC LAYER ETCH SYSTEMS FOR SELECTIVELY ETCHING WITH HALOGEN-BASE...
Publication number
20220005740
Publication date
Jan 6, 2022
LAM RESEARCH CORPORATION
Dong Woo PAENG
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ATOMIC LAYER ETCH AND DEPOSITION PROCESSING SYSTEMS INCLUDING A LEN...
Publication number
20210143032
Publication date
May 13, 2021
LAM RESEARCH CORPORATION
Dong Woo PAENG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ISOTROPIC ETCHING OF FILM WITH ATOMIC LAYER CONTROL
Publication number
20180218915
Publication date
Aug 2, 2018
LAM RESEARCH CORPORATION
Yunsang KIM
H01 - BASIC ELECTRIC ELEMENTS