Dong-Xuan Lu

Person

  • Miaoli Hsien, TW

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Methods of spin-on wafer cleaning

    • Publication number 20060196526
    • Publication date Sep 7, 2006
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Jun Wu
    • B08 - CLEANING