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Dong-Xuan Lu
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Miaoli Hsien, TW
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Patents Grants
last 30 patents
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Patent Grant
Methods of spin-on wafer cleaning
Patent number
7,611,589
Issue date
Nov 3, 2009
Taiwan Semiconductor Manufacturing Co., Ltd.
Jun Wu
B08 - CLEANING
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last 30 patents
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Patent Application
Methods of spin-on wafer cleaning
Publication number
20060196526
Publication date
Sep 7, 2006
Taiwan Semiconductor Manufacturing Co., Ltd.
Jun Wu
B08 - CLEANING