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Hwaseong-si, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma etching method and semiconductor device fabrication method i...
Patent number
12,020,903
Issue date
Jun 25, 2024
Samsung Electronics Co., Ltd.
Yonghee Kim
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Apparatus and method fabricating semiconductor device
Patent number
12,014,905
Issue date
Jun 18, 2024
Samsung Electronics Co., Ltd.
Nam Kyun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching method and semiconductor device fabrication method i...
Patent number
11,545,341
Issue date
Jan 3, 2023
Samsung Electronics Co., Ltd.
Yonghee Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck and plasma processing apparatus including the same
Patent number
11,367,597
Issue date
Jun 21, 2022
Samsung Electronics Co., Ltd.
Yongwoo Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma control apparatus and plasma processing system including the...
Patent number
11,282,679
Issue date
Mar 22, 2022
Samsung Electronics Co., Ltd.
Donghyeon Na
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240038505
Publication date
Feb 1, 2024
Samsung Electronics Co., Ltd.
Donghyeon Na
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230154729
Publication date
May 18, 2023
SAMSUNG ELECTRONICSC CO., LTD.
Donghyeon NA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHUCK ASSEMBLY, FABRICATION SYSTEM THEREWITH, AND METHOD OF FABRICA...
Publication number
20230145476
Publication date
May 11, 2023
Samsung Electronics Co., Ltd.
Seongha JEONG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA ETCHING METHOD AND SEMICONDUCTOR DEVICE FABRICATION METHOD I...
Publication number
20230084124
Publication date
Mar 16, 2023
Samsung Electronics Co., Ltd.
Yonghee KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MEASURING PARAMETERS OF PLASMA, APPARATUS FOR MEASURING P...
Publication number
20230060400
Publication date
Mar 2, 2023
Samsung Electronics Co., Ltd.
Yoonbum Nam
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FABRICATING SEMICONDUCTOR DEVICE
Publication number
20220165552
Publication date
May 26, 2022
Samsung Electronics Co., Ltd.
NAM KYUN KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA ETCHING METHOD AND SEMICONDUCTOR DEVICE FABRICATION METHOD I...
Publication number
20210104382
Publication date
Apr 8, 2021
Samsung Electronics Co., Ltd.
Yonghee KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA CONTROL APPARATUS AND PLASMA PROCESSING SYSTEM INCLUDING THE...
Publication number
20200373126
Publication date
Nov 26, 2020
Samsung Electronics Co., Ltd.
Donghyeon NA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK AND PLASMA PROCESSING APPARATUS INCLUDING THE SAME
Publication number
20200013595
Publication date
Jan 9, 2020
Samsung Electronics Co., Ltd.
Yongwoo LEE
H01 - BASIC ELECTRIC ELEMENTS