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Patents Grants
last 30 patents
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Patent Grant
Method of cleaning collector of EUV light source system
Patent number
11,940,620
Issue date
Mar 26, 2024
Samsung Electronics Co., Ltd.
Changsoon Lim
B08 - CLEANING
Information
Patent Grant
Method of exposure using extreme ultraviolet and method of manufact...
Patent number
11,490,499
Issue date
Nov 1, 2022
Samsung Electronics Co., Ltd.
Sungho Jang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD OF CLEANING COLLECTOR OF EUV LIGHT SOURCE SYSTEM
Publication number
20220308339
Publication date
Sep 29, 2022
Samsung Electronics Co., Ltd.
Changsoon LIM
B08 - CLEANING
Information
Patent Application
METHOD OF EXPOSURE USING EXTREME ULTRAVIOLET AND METHOD OF MANUFACT...
Publication number
20220070992
Publication date
Mar 3, 2022
Samsung Electronics Co., Ltd.
SUNGHO JANG
H01 - BASIC ELECTRIC ELEMENTS