Dongkyeng Han

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Suwon-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for generating extreme ultraviolet light and lithography...
- Patent number 11,720,027
- Issue date Aug 8, 2023
- Samsung Electronics Co., Ltd.
- Injae Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR FABRICATION APPARATUS
- Publication number 20230251576
- Publication date Aug 10, 2023
- Samsung Electronics Co., Ltd.
- OHKUG KWON
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLING CHUCKING FORCE
- Publication number 20230191547
- Publication date Jun 22, 2023
- Samsung Electronics Co., Ltd.
- Jeongdu KIM
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT AND LITHOGRAPHY...
- Publication number 20220082946
- Publication date Mar 17, 2022
- Samsung Electronics Co., Ltd.
- Injae Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY