Dongkyu SHIN

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Patents Grantslast 30 patents

Information Patent Grant
Wafer processing apparatus and wafer processing method using the same
- Patent number 11,990,348
- Issue date May 21, 2024
- Samsung Electronics Co., Ltd.
- Chanyeong Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam generator, plasma processing apparatus having the sam...
- Patent number 11,195,696
- Issue date Dec 7, 2021
- Samsung Electronics Co., Ltd.
- Dongkyu Shin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FOCUS RING ALIGNMENT APPARATUS
- Publication number 20250087464
- Publication date Mar 13, 2025
- Samsung Electronics Co., LTD
- Jaehyun SOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING THE SAME
- Publication number 20250054735
- Publication date Feb 13, 2025
- Samsung Electronics Co., Ltd.
- Wookhyeon Kwon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING APPARATUS AND WAFER PROCESSING METHOD USING THE SAME
- Publication number 20240282586
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Chanyeong Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING APPARATUS AND WAFER PROCESSING METHOD USING THE SAME
- Publication number 20220068659
- Publication date Mar 3, 2022
- Samsung Electronics Co., Ltd.
- CHANYEONG JEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM GENERATOR, PLASMA PROCESSING APPARATUS HAVING THE SAM...
- Publication number 20210110997
- Publication date Apr 15, 2021
- Samsung Electronics Co., Ltd.
- Dongkyu SHIN
- H01 - BASIC ELECTRIC ELEMENTS