-
-
-
-
-
-
-
RADICAL STEAM CVD
-
Publication number 20120177846
-
Publication date Jul 12, 2012
-
Applied Materials, Inc.
-
DongQing Li
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
CONFORMAL LAYERS BY RADICAL-COMPONENT CVD
-
Publication number 20110217851
-
Publication date Sep 8, 2011
-
Applied Materials, Inc.
-
Jingmei Liang
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
-
-
-
In-situ-etch-assisted HDP deposition
-
Publication number 20060166515
-
Publication date Jul 27, 2006
-
Applied Materials, Inc.
-
M. Ziaul Karim
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
-
Gap-fill techniques
-
Publication number 20050136684
-
Publication date Jun 23, 2005
-
Applied Materials, Inc.
-
Kevin Mikio Mukai
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
-
HDP-CVD MULTISTEP GAPFILL PROCESS
-
Publication number 20040245091
-
Publication date Dec 9, 2004
-
Applied Materials, Inc.
-
M Ziaul Karim
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
-
-
-
-