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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Multi-zone semiconductor substrate supports
Patent number
11,915,950
Issue date
Feb 27, 2024
Applied Materials, Inc.
Mehmet Tugrul Samir
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor processing chamber multistage mixing apparatus
Patent number
11,515,179
Issue date
Nov 29, 2022
Applied Materials, Inc.
Mehmet Tugrul Samir
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective material removal
Patent number
11,417,534
Issue date
Aug 16, 2022
Applied Materials, Inc.
Ming Xia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor processing chamber for multiple precursor flow
Patent number
11,361,939
Issue date
Jun 14, 2022
Applied Materials, Inc.
Mehmet Tugrul Samir
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor processing chamber for multiple precursor flow
Patent number
11,276,559
Issue date
Mar 15, 2022
Applied Materials, Inc.
Mehmet Tugrul Samir
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-zone semiconductor substrate supports
Patent number
11,276,590
Issue date
Mar 15, 2022
Applied Materials, Inc.
Mehmet Tugrul Samir
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Seasoning process for establishing a stable process and extending c...
Patent number
11,164,724
Issue date
Nov 2, 2021
Applied Materials, Inc.
Sang Won Kang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process window widening using coated parts in plasma etch processes
Patent number
11,101,136
Issue date
Aug 24, 2021
Applied Materials, Inc.
Dongqing Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor processing chamber multistage mixing apparatus and me...
Patent number
10,964,512
Issue date
Mar 30, 2021
Applied Materials, Inc.
Mehmet Tugrul Samir
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor processing chamber multistage mixing apparatus
Patent number
10,699,921
Issue date
Jun 30, 2020
Applied Materials, Inc.
Mehmet Tugrul Samir
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Semiconductor processing chamber multistage mixing apparatus
Patent number
10,679,870
Issue date
Jun 9, 2020
Applied Materials, Inc.
Mehmet Tugrul Samir
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Process window widening using coated parts in plasma etch processes
Patent number
10,297,458
Issue date
May 21, 2019
Applied Materials, Inc.
Dongqing Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for selective dry etch
Patent number
10,134,581
Issue date
Nov 20, 2018
Applied Materials, Inc.
Ning Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Seasoning process for establishing a stable process and extending c...
Patent number
10,008,366
Issue date
Jun 26, 2018
Applied Materials, Inc.
Sang Won Kang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Saving ion-damaged spacers
Patent number
9,721,789
Issue date
Aug 1, 2017
Applied Materials, Inc.
Dongqing Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Grooved insulator to reduce leakage current
Patent number
9,659,753
Issue date
May 23, 2017
Applied Materials, Inc.
Tae Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry-etch for selective oxidation removal
Patent number
9,064,816
Issue date
Jun 23, 2015
Applied Materials, Inc.
Sang Hyuk Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Uniform dry etch in two stages
Patent number
8,741,778
Issue date
Jun 3, 2014
Applied Materials, Inc.
Dongqing Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Smooth SiConi etch for silicon-containing films
Patent number
8,501,629
Issue date
Aug 6, 2013
Applied Materials, Inc.
Jing Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High-temperature selective dry etch having reduced post-etch solid...
Patent number
8,475,674
Issue date
Jul 2, 2013
Applied Materials, Inc.
Kiran V. Thadani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Invertable pattern loading with dry etch
Patent number
8,435,902
Issue date
May 7, 2013
Applied Materials, Inc.
Jing Tang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHODS OF HIGHLY SELECTIVE SILICON OXIDE REMOVAL
Publication number
20240087910
Publication date
Mar 14, 2024
Applied Materials, Inc.
Lala Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ZONE SEMICONDUCTOR SUBSTRATE SUPPORTS
Publication number
20220148894
Publication date
May 12, 2022
Applied Materials, Inc.
Mehmet Tugrul Samir
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Selective Deposition of Dielectric Films
Publication number
20210043448
Publication date
Feb 11, 2021
Applied Materials, Inc.
Ning Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PROCESSING CHAMBER MULTISTAGE MIXING APPARATUS
Publication number
20200328098
Publication date
Oct 15, 2020
Applied Materials, Inc.
Mehmet Tugrul Samir
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE MATERIAL REMOVAL
Publication number
20200098586
Publication date
Mar 26, 2020
Applied Materials, Inc.
Ming Xia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING CHAMBER MULTISTAGE MIXING APPARATUS
Publication number
20190333786
Publication date
Oct 31, 2019
Applied Materials, Inc.
Mehmet Tugrul Samir
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
SEMICONDUCTOR PROCESSING CHAMBER FOR MULTIPLE PRECURSOR FLOW
Publication number
20190311883
Publication date
Oct 10, 2019
Applied Materials, Inc.
Mehmet Tugrul Samir
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS WINDOW WIDENING USING COATED PARTS IN PLASMA ETCH PROCESSES
Publication number
20190272998
Publication date
Sep 5, 2019
Applied Materials, Inc.
Dongqing Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING CHAMBER MULTISTAGE MIXING APPARATUS AND ME...
Publication number
20190252154
Publication date
Aug 15, 2019
Applied Materials, Inc.
Mehmet Tugrul Samir
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING CHAMBER MULTISTAGE MIXING APPARATUS
Publication number
20190252216
Publication date
Aug 15, 2019
Applied Materials, Inc.
Mehmet Tugrul Samir
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
PROCESS WINDOW WIDENING USING COATED PARTS IN PLASMA ETCH PROCESSES
Publication number
20190043726
Publication date
Feb 7, 2019
Applied Materials, Inc.
Dongqing Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ZONE SEMICONDUCTOR SUBSTRATE SUPPORTS
Publication number
20180337074
Publication date
Nov 22, 2018
Applied Materials, Inc.
Mehmet Tugrul Samir
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEASONING PROCESS FOR ESTABLISHING A STABLE PROCESS AND EXTENDING C...
Publication number
20180337021
Publication date
Nov 22, 2018
Applied Materials, Inc.
Sang Won KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING CHAMBER FOR MULTIPLE PRECURSOR FLOW
Publication number
20180337057
Publication date
Nov 22, 2018
Applied Materials, Inc.
Mehmet Tugrul Samir
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method And Apparatus For Selective Deposition Of Dielectric Films
Publication number
20180211833
Publication date
Jul 26, 2018
Applied Materials, Inc.
Ning Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods And Apparatus For Selective Dry Etch
Publication number
20170263438
Publication date
Sep 14, 2017
Applied Materials, Inc.
Ning Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FABRICATING NANOWIRES FOR HORIZONTAL GATE ALL AROUND DEV...
Publication number
20170194430
Publication date
Jul 6, 2017
Applied Materials, Inc.
Bingxi Sun WOOD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEASONING PROCESS FOR ESTABLISHING A STABLE PROCESS AND EXTENDING C...
Publication number
20170069463
Publication date
Mar 9, 2017
Applied Materials, Inc.
Sang Won KANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GROOVED INSULATOR TO REDUCE LEAKAGE CURRENT
Publication number
20160042920
Publication date
Feb 11, 2016
Applied Materials, Inc.
TAE CHO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRY-ETCH FOR SELECTIVE OXIDATION REMOVAL
Publication number
20150311089
Publication date
Oct 29, 2015
Applied Materials, Inc.
Sang Hyuk Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRY-ETCH FOR SELECTIVE OXIDATION REMOVAL
Publication number
20140199850
Publication date
Jul 17, 2014
Applied Materials, Inc.
Sang Hyuk Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
UNIFORM DRY ETCH IN TWO STAGES
Publication number
20120196447
Publication date
Aug 2, 2012
Applied Materials, Inc.
Dongqing Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH-TEMPERATURE SELECTIVE DRY ETCH HAVING REDUCED POST-ETCH SOLID...
Publication number
20110266252
Publication date
Nov 3, 2011
Applied Materials, Inc.
Kiran V. Thadani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INVERTABLE PATTERN LOADING WITH DRY ETCH
Publication number
20110230052
Publication date
Sep 22, 2011
Applied Materials, Inc.
Jing Tang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SMOOTH SICONI ETCH FOR SILICON-CONTAINING FILMS
Publication number
20110151674
Publication date
Jun 23, 2011
Applied Materials, Inc.
JING TANG
H01 - BASIC ELECTRIC ELEMENTS