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last 30 patents
Information
Patent Grant
Pattern sheet, semiconductor intermediate product, and hole etching...
Patent number
12,106,970
Issue date
Oct 1, 2024
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Qiushi Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reaction chamber and plasma processing apparatus
Patent number
10,854,482
Issue date
Dec 1, 2020
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Xingcun Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate etching method and substrate processing device
Patent number
9,187,319
Issue date
Nov 17, 2015
Beijing NMC Co., Ltd.
Gang Wei
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
PATTERN SHEET, SEMICONDUCTOR INTERMEDIATE PRODUCT, AND HOLE ETCHING...
Publication number
20240266182
Publication date
Aug 8, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Qiushi XIE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REACTION CHAMBER AND PLASMA PROCESSING APPARATUS
Publication number
20170011938
Publication date
Jan 12, 2017
Beijing NMC Co., Ltd.
Xingcun LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE ETCHING METHOD AND SUBSTRATE PROCESSING DEVICE
Publication number
20140363975
Publication date
Dec 11, 2014
Beijing NMC Co., Ltd.
Gang Wei
B81 - MICRO-STRUCTURAL TECHNOLOGY