Dongseok Han

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Daegu, KR

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Patents Grantslast 30 patents

Information Patent Grant
Method of etching at low temperature and plasma etching apparatus
- Patent number 10,818,503
- Issue date Oct 27, 2020
- Samsung Electronics Co., Ltd.
- Cheonkyu Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COOLANT TUBE BLOCK ASSEMBLY AND SEMICONDUCTOR PROCESSING DEVICE INC...
- Publication number 20240379334
- Publication date Nov 14, 2024
- Samsung Electronics Co., Ltd.
- Woojin Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240038505
- Publication date Feb 1, 2024
- Samsung Electronics Co., Ltd.
- Donghyeon Na
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20230143049
- Publication date May 11, 2023
- Samsung Electronics Co., Ltd.
- Seunghan Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND...
- Publication number 20230143327
- Publication date May 11, 2023
- Samsung Electronics Co., Ltd.
- DONGSEOK HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MEASURING PARAMETERS OF PLASMA, APPARATUS FOR MEASURING P...
- Publication number 20230060400
- Publication date Mar 2, 2023
- Samsung Electronics Co., Ltd.
- Yoonbum Nam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ETCHING AT LOW TEMPERATURE AND PLASMA ETCHING APPARATUS
- Publication number 20190385860
- Publication date Dec 19, 2019
- Samsung Electronics Co., Ltd.
- CHEONKYU LEE
- H01 - BASIC ELECTRIC ELEMENTS