Dongsuk PARK

Person

Mechanicville, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Self-referencing and self-calibrating interference pattern overlay...
- Patent number 11,231,654
- Issue date Jan 25, 2022
- GLOBALFOUNDRIES U.S. Inc.
- Dongyue Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device/health of line (HOL) aware eBeam based overlay (EBO OVL) str...
- Patent number 10,804,170
- Issue date Oct 13, 2020
- GLOBALFOUNDRIES Inc.
- Hongliang Shen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method employing three-dimensional (3D) emulation of in-...
- Patent number 10,733,354
- Issue date Aug 4, 2020
- GLOBALFOUNDRIES Inc.
- Hojin Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Self-referencing and self-calibrating interference pattern overlay...
- Patent number 10,705,435
- Issue date Jul 7, 2020
- GLOBALFOUNDRIES Inc.
- Dongyue Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Overlay structures
- Patent number 10,483,214
- Issue date Nov 19, 2019
- GLOBALFOUNDRIES Inc.
- Xintuo Dai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dynamic integrated circuit fabrication methods
- Patent number 10,103,070
- Issue date Oct 16, 2018
- GLOBALFOUNDRIES Inc.
- Dongsuk Park
- G01 - MEASURING TESTING
Information Patent Grant
Method of using dummy patterns for overlay target design and overla...
- Patent number 9,633,915
- Issue date Apr 25, 2017
- GLOBALFOUNDRIES Inc.
- Dongsuk Park
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY...
- Publication number 20220334502
- Publication date Oct 20, 2022
- Dongyue Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE/HEALTH OF LINE (HOL) AWARE EBEAM BASED OVERLAY (EBO OVL) STR...
- Publication number 20200294868
- Publication date Sep 17, 2020
- GLOBALFOUNDRIES INC.
- Hongliang SHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY...
- Publication number 20200241429
- Publication date Jul 30, 2020
- GLOBALFOUNDRIES INC.
- Dongyue Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DESIGN SYSTEM AND METHOD EMPLOYING THREE-DIMENSIONAL (3D) EMULATION...
- Publication number 20200201955
- Publication date Jun 25, 2020
- Hojin Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY...
- Publication number 20190219930
- Publication date Jul 18, 2019
- GLOBALFOUNDRIES INC.
- Dongyue Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OVERLAY STRUCTURES
- Publication number 20190206802
- Publication date Jul 4, 2019
- GLOBALFOUNDRIES INC.
- Xintuo DAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIGNAL DETECTION METHOLODOGY FOR FABRICATION CONTROL
- Publication number 20170199511
- Publication date Jul 13, 2017
- GLOBALFOUNDRIES INC.
- Dongsuk PARK
- G05 - CONTROLLING REGULATING
Information Patent Application
DYNAMIC INTEGRATED CIRCUIT FABRICATION METHODS
- Publication number 20160284609
- Publication date Sep 29, 2016
- GLOBALFOUNDRIES INC.
- Dongsuk PARK
- G01 - MEASURING TESTING

Dongsuk PARK

Person

Patents Grantslast 30 patents

Self-referencing and self-calibrating interference pattern overlay...

Device/health of line (HOL) aware eBeam based overlay (EBO OVL) str...

System and method employing three-dimensional (3D) emulation of in-...

Self-referencing and self-calibrating interference pattern overlay...

Overlay structures

Dynamic integrated circuit fabrication methods

Method of using dummy patterns for overlay target design and overla...

Patents Applicationslast 30 patents

SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY...

DEVICE/HEALTH OF LINE (HOL) AWARE EBEAM BASED OVERLAY (EBO OVL) STR...

SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY...

DESIGN SYSTEM AND METHOD EMPLOYING THREE-DIMENSIONAL (3D) EMULATION...

SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY...

OVERLAY STRUCTURES

SIGNAL DETECTION METHOLODOGY FOR FABRICATION CONTROL

DYNAMIC INTEGRATED CIRCUIT FABRICATION METHODS