Dongwei LI

Person

Nirasaki City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for transferring substrate and method for transferring su...
- Patent number 12,362,215
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus and transfer method
- Patent number 12,322,629
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Tomonori Horiuchi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transfer device and substrate processing system
- Patent number 11,948,822
- Issue date Apr 2, 2024
- Tokyo Electron Limited
- Dongwei Li
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Transfer Module, and Substrate Transfer Method in Semiconductor Man...
- Publication number 20250174476
- Publication date May 29, 2025
- TOKYO ELECTRON LIMITED
- Dongwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM A...
- Publication number 20240120225
- Publication date Apr 11, 2024
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20230307278
- Publication date Sep 28, 2023
- TOKYO ELECTRON LIMITED
- Dongwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSFERRING SUBSTRATE AND METHOD FOR TRANSFERRING SU...
- Publication number 20230170239
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPENING/CLOSING APPARATUS AND TRANSPORT CHAMBER
- Publication number 20220301911
- Publication date Sep 22, 2022
- TOKYO ELECTRON LIMITED
- Dongwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20220285191
- Publication date Sep 8, 2022
- TOKYO ELECTRON LIMITED
- Dongwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS AND TRANSFER METHOD
- Publication number 20220076977
- Publication date Mar 10, 2022
- TOKYO ELECTRON LIMITED
- Tomonori HORIUCHI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Person

Patents Grantslast 30 patents

Apparatus for transferring substrate and method for transferring su...

Transfer apparatus and transfer method

Substrate transfer device and substrate processing system

Patents Applicationslast 30 patents

Transfer Module, and Substrate Transfer Method in Semiconductor Man...

APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM A...

SUBSTRATE PROCESSING SYSTEM

APPARATUS FOR TRANSFERRING SUBSTRATE AND METHOD FOR TRANSFERRING SU...

OPENING/CLOSING APPARATUS AND TRANSPORT CHAMBER

SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING SYSTEM

TRANSFER APPARATUS AND TRANSFER METHOD