Dongwei LI

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transfer device and substrate processing system
- Patent number 11,948,822
- Issue date Apr 2, 2024
- Tokyo Electron Limited
- Dongwei Li
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR TRANSFERRING SUBSTRATE, SUBSTRATE PROCESSING SYSTEM A...
- Publication number 20240120225
- Publication date Apr 11, 2024
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20230307278
- Publication date Sep 28, 2023
- TOKYO ELECTRON LIMITED
- Dongwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSFERRING SUBSTRATE AND METHOD FOR TRANSFERRING SU...
- Publication number 20230170239
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPENING/CLOSING APPARATUS AND TRANSPORT CHAMBER
- Publication number 20220301911
- Publication date Sep 22, 2022
- TOKYO ELECTRON LIMITED
- Dongwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20220285191
- Publication date Sep 8, 2022
- TOKYO ELECTRON LIMITED
- Dongwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS AND TRANSFER METHOD
- Publication number 20220076977
- Publication date Mar 10, 2022
- TOKYO ELECTRON LIMITED
- Tomonori HORIUCHI
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL