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Dongwoo Wi
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Hwaseong-si, KR
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last 30 patents
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Patent Grant
Valve structure and substrate processing apparatus including the same
Patent number
11,948,814
Issue date
Apr 2, 2024
Samsung Electronics Co., Ltd.
Kangmin Park
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
VALVE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
Publication number
20240213053
Publication date
Jun 27, 2024
Samsung Electronics Co., Ltd.
Kangmin Park
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
VALVE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
Publication number
20230130512
Publication date
Apr 27, 2023
Samsung Electronics Co., Ltd.
Kangmin Park
H01 - BASIC ELECTRIC ELEMENTS