Dongyue Yang

Person

Lawrenceville, NJ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Self-referencing and self-calibrating interference pattern overlay...
- Patent number 11,675,277
- Issue date Jun 13, 2023
- KLA Corporation
- Dongyue Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Self-referencing and self-calibrating interference pattern overlay...
- Patent number 11,231,654
- Issue date Jan 25, 2022
- GLOBALFOUNDRIES U.S. Inc.
- Dongyue Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Structure and method to improve overlay performance in semiconducto...
- Patent number 10,833,022
- Issue date Nov 10, 2020
- GLOBALFOUNDRIES Inc.
- Cung D. Tran
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Overlay control with corrections for lens aberrations
- Patent number 10,809,633
- Issue date Oct 20, 2020
- GLOBALFOUNDRIES Inc.
- Dongyue Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method employing three-dimensional (3D) emulation of in-...
- Patent number 10,733,354
- Issue date Aug 4, 2020
- GLOBALFOUNDRIES Inc.
- Hojin Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Self-referencing and self-calibrating interference pattern overlay...
- Patent number 10,705,435
- Issue date Jul 7, 2020
- GLOBALFOUNDRIES Inc.
- Dongyue Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Asymmetric overlay mark for overlay measurement
- Patent number 10,707,175
- Issue date Jul 7, 2020
- GLOBALFOUNDRIES Inc.
- Wei Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for aligning integrated circuit layers using m...
- Patent number 10,635,007
- Issue date Apr 28, 2020
- GLOBALFOUNDRIES Inc.
- Dongyue Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Structure and method to improve overlay performance in semiconducto...
- Patent number 10,504,851
- Issue date Dec 10, 2019
- GLOBALFOUNDRIES Inc.
- Cung D. Tran
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY...
- Publication number 20220334502
- Publication date Oct 20, 2022
- Dongyue Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY...
- Publication number 20200241429
- Publication date Jul 30, 2020
- GLOBALFOUNDRIES INC.
- Dongyue Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DESIGN SYSTEM AND METHOD EMPLOYING THREE-DIMENSIONAL (3D) EMULATION...
- Publication number 20200201955
- Publication date Jun 25, 2020
- Hojin Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHOD FOR ALIGNING INTEGRATED CIRCUIT LAYERS USING M...
- Publication number 20200152498
- Publication date May 14, 2020
- GLOBALFOUNDRIES INC.
- Dongyue Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE AND METHOD TO IMPROVE OVERLAY PERFORMANCE IN SEMICONDUCTO...
- Publication number 20200051923
- Publication date Feb 13, 2020
- GLOBALFOUNDRIES INC.
- Cung D. Tran
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ASYMMETRIC OVERLAY MARK FOR OVERLAY MEASUREMENT
- Publication number 20190363053
- Publication date Nov 28, 2019
- GLOBALFOUNDRIES INC.
- Wei Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE AND METHOD TO IMPROVE OVERLAY PERFORMANCE IN SEMICONDUCTO...
- Publication number 20190267329
- Publication date Aug 29, 2019
- GLOBALFOUNDRIES INC.
- Cung D. Tran
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY...
- Publication number 20190219930
- Publication date Jul 18, 2019
- GLOBALFOUNDRIES INC.
- Dongyue Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Dongyue Yang

Person

Patents Grantslast 30 patents

Self-referencing and self-calibrating interference pattern overlay...

Self-referencing and self-calibrating interference pattern overlay...

Structure and method to improve overlay performance in semiconducto...

Overlay control with corrections for lens aberrations

System and method employing three-dimensional (3D) emulation of in-...

Self-referencing and self-calibrating interference pattern overlay...

Asymmetric overlay mark for overlay measurement

Apparatus and method for aligning integrated circuit layers using m...

Structure and method to improve overlay performance in semiconducto...

Patents Applicationslast 30 patents

SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY...

SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY...

DESIGN SYSTEM AND METHOD EMPLOYING THREE-DIMENSIONAL (3D) EMULATION...

APPARATUS AND METHOD FOR ALIGNING INTEGRATED CIRCUIT LAYERS USING M...

STRUCTURE AND METHOD TO IMPROVE OVERLAY PERFORMANCE IN SEMICONDUCTO...

ASYMMETRIC OVERLAY MARK FOR OVERLAY MEASUREMENT

STRUCTURE AND METHOD TO IMPROVE OVERLAY PERFORMANCE IN SEMICONDUCTO...

SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY...