Donovan Beckel

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Wakefield, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Gas bearing electrostatic chuck
- Patent number 9,036,326
- Issue date May 19, 2015
- Axcelis Technologies, Inc.
- William David Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam angle calibration and emittance measurement system for rib...
- Patent number 8,168,941
- Issue date May 1, 2012
- Axcelis Technologies, Inc.
- Marvin Farley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece handling scan arm for ion implantation system
- Patent number 7,560,705
- Issue date Jul 14, 2009
- Axcelis Technologies, Inc.
- Ari Eiriksson
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION BEAM ANGLE CALIBRATION AND EMITTANCE MEASUREMENT SYSTEM FOR RIB...
- Publication number 20100181470
- Publication date Jul 22, 2010
- Axcelis Technologies, Inc.
- Marvin Farley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS BEARING ELECTROSTATIC CHUCK
- Publication number 20090273878
- Publication date Nov 5, 2009
- Axcelis Technologies, Inc.
- William David Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE HANDLING SCAN ARM FOR ION IMPLANTATION SYSTEM
- Publication number 20080105836
- Publication date May 8, 2008
- Ari Eiriksson
- H01 - BASIC ELECTRIC ELEMENTS