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Daejeon, KR
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Patents Grants
last 30 patents
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Patent Grant
MEMS tunable capacitor based on angular vertical comb drives
Patent number
7,085,122
Issue date
Aug 1, 2006
The Regents of the University of California
Ming C. Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
MEMS tunable capacitor based on angular vertical comb drives
Publication number
20050013087
Publication date
Jan 20, 2005
The Regents of the University of California.
Ming C. Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY