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Dor Perry
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Haifa, IL
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last 30 patents
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Patent Grant
Localized telecentricity and focus optimization for overlay metrology
Patent number
10,677,588
Issue date
Jun 9, 2020
KLA-Tencor Corporation
Andrew V. Hill
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
navigation accuracy using camera coupled with detector assembly
Publication number
20230316487
Publication date
Oct 5, 2023
BRUKER TECHNOLOGIES LTD.
Alexander Krokhmal
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
Localized Telecentricity and Focus Optimization for Overlay Metrology
Publication number
20190310080
Publication date
Oct 10, 2019
KLA-Tencor Corporation
Andrew V. Hill
G06 - COMPUTING CALCULATING COUNTING