Douglas C. Watson

Person

Campbell, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid jet and recovery system for immersion lithography
- Patent number 10,185,222
- Issue date Jan 22, 2019
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cleanup method for optics in immersion lithography using object on...
- Patent number 9,958,786
- Issue date May 1, 2018
- Nikon Corporation
- Hidemi Kawai
- B08 - CLEANING
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 9,910,370
- Issue date Mar 6, 2018
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid jet and recovery system for immersion lithography
- Patent number 9,785,057
- Issue date Oct 10, 2017
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Orientation independent focus mechanisms for laser radar
- Patent number 9,644,720
- Issue date May 9, 2017
- Nikon Corporation
- Alec Robertson
- G02 - OPTICS
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 9,632,427
- Issue date Apr 25, 2017
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vacuum chamber assembly for supporting a workpiece
- Patent number 9,341,942
- Issue date May 17, 2016
- Nikon Research Corporation of America
- Fardad Hashemi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mirror assembly for an exposure apparatus
- Patent number 9,323,157
- Issue date Apr 26, 2016
- Nikon Corporation
- Alton H. Phillips
- G02 - OPTICS
Information Patent Grant
Exposure method and device manufacturing method including selective...
- Patent number 9,304,385
- Issue date Apr 5, 2016
- Nikon Corporation
- Alton H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid jet and recovery system for immersion lithography
- Patent number 9,304,409
- Issue date Apr 5, 2016
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reaction assembly for a stage assembly
- Patent number 9,298,077
- Issue date Mar 29, 2016
- Nikon Corporation
- Douglas C. Watson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multiple-blade holding devices
- Patent number 8,941,814
- Issue date Jan 27, 2015
- Nikon Corporation
- Douglas C. Watson
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
High heat load optics with vibration isolated hoses in an extreme u...
- Patent number 8,937,289
- Issue date Jan 20, 2015
- Nikon Corporation
- Douglas C. Watson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Control systems and methods for compensating for effects of a stage...
- Patent number 8,853,988
- Issue date Oct 7, 2014
- Nikon Corporation
- Michael B. Binnard
- G05 - CONTROLLING REGULATING
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 8,830,443
- Issue date Sep 9, 2014
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for utilizing in-situ measurements techniques...
- Patent number 8,794,011
- Issue date Aug 5, 2014
- Nikon Corporation
- Alton H. Phillips
- G01 - MEASURING TESTING
Information Patent Grant
Temperature-controlled holding devices for planar articles
- Patent number 8,767,174
- Issue date Jul 1, 2014
- Nikon Corporation
- Michael R. Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High NA catadioptric imaging optics for imaging A reticle to a pair...
- Patent number 8,705,170
- Issue date Apr 22, 2014
- Nikon Corporation
- David M. Williamson
- G02 - OPTICS
Information Patent Grant
System for isolating an exposure apparatus
- Patent number 8,441,615
- Issue date May 14, 2013
- Nikon Corporation
- Fardad A. Hashemi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Self-correcting optical elements for high-thermal-load optical systems
- Patent number 8,425,060
- Issue date Apr 23, 2013
- Nikon Corporation
- Douglas C. Watson
- G02 - OPTICS
Information Patent Grant
Conforming seats for clamps used in mounting an optical element, an...
- Patent number 8,416,386
- Issue date Apr 9, 2013
- Nikon Corporation
- Christopher S. Margeson
- G02 - OPTICS
Information Patent Grant
Cleanup method for optics in immersion lithography using sonic device
- Patent number 8,085,381
- Issue date Dec 27, 2011
- Nikon Corporation
- Hidemi Kawai
- B08 - CLEANING
Information Patent Grant
Liquid jet and recovery system for immersion lithography
- Patent number 8,059,258
- Issue date Nov 15, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 7,969,552
- Issue date Jun 28, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 7,965,376
- Issue date Jun 21, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid jet and recovery system for immersion lithography
- Patent number 7,932,989
- Issue date Apr 26, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 7,929,111
- Issue date Apr 19, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental system including a transport region for an immersion...
- Patent number 7,929,110
- Issue date Apr 19, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage assembly with lightweight fine stage and low transmissibility
- Patent number 7,869,000
- Issue date Jan 11, 2011
- Nikon Corporation
- Yoichi Arai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Damper for a stage assembly
- Patent number 7,830,046
- Issue date Nov 9, 2010
- Nikon Corporation
- Michael Binnard
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY
- Publication number 20190129311
- Publication date May 2, 2019
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION...
- Publication number 20180164703
- Publication date Jun 14, 2018
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY
- Publication number 20180024442
- Publication date Jan 25, 2018
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION...
- Publication number 20170219940
- Publication date Aug 3, 2017
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY
- Publication number 20160209762
- Publication date Jul 21, 2016
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION...
- Publication number 20160085160
- Publication date Mar 24, 2016
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY
- Publication number 20140253888
- Publication date Sep 11, 2014
- Nikon Corporation
- W. Thomas NOVAK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTERMITTENT TEMPERATURE CONTROL OF MOVABLE OPTICAL ELEMENTS
- Publication number 20140176931
- Publication date Jun 26, 2014
- Nikon Corporation
- Alton H. Phillips
- G02 - OPTICS
Information Patent Application
ORIENTATION INDEPENDENT FOCUS MECHANISMS FOR LASER RADAR
- Publication number 20140152972
- Publication date Jun 5, 2014
- Nikon Corporation
- Alec Robertson
- G02 - OPTICS
Information Patent Application
CLEANUP METHOD FOR OPTICS IN IMMERSION LITHOGRAPHY
- Publication number 20140132939
- Publication date May 15, 2014
- Nikon Corporation
- Hidemi KAWAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MIRROR ASSEMBLY FOR AN EXPOSURE APPARATUS
- Publication number 20140078485
- Publication date Mar 20, 2014
- Alton H Phillips
- G02 - OPTICS
Information Patent Application
High Heat Load Optics with Vibration Isolated Hoses in an Extreme U...
- Publication number 20130323649
- Publication date Dec 5, 2013
- NIKON
- Douglas C. Watson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VACUUM CHAMBER ASSEMBLY FOR SUPPORTING A WORKPIECE
- Publication number 20130155385
- Publication date Jun 20, 2013
- Nikon Corporation
- Fardad Hashemi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DAMPER WITH A PLURALITY OF SQUEEZE-FILM DAMPERS ACTING IN PARALLEL
- Publication number 20130114152
- Publication date May 9, 2013
- Nikon Corporation
- Douglas C. Watson
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
REACTION ASSEMBLY FOR A STAGE ASSEMBLY
- Publication number 20130088703
- Publication date Apr 11, 2013
- Nikon Corporation
- Douglas C. Watson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTIPLE-BLADE HOLDING DEVICES
- Publication number 20120320362
- Publication date Dec 20, 2012
- NIKON CORPORATION
- Douglas C. Watson
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING THE DISTORTION OF A RETICLE
- Publication number 20120120379
- Publication date May 17, 2012
- Alton H. Phillips
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Method and Apparatus for Utilizing In-Situ Measurements Techniques...
- Publication number 20120090332
- Publication date Apr 19, 2012
- Alton Phillips
- G01 - MEASURING TESTING
Information Patent Application
Liquid jet and recovery system for immersion lithography
- Publication number 20120019792
- Publication date Jan 26, 2012
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Environmental system including a transport region for an immersion...
- Publication number 20110235007
- Publication date Sep 29, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPERATURE-CONTROLLED HOLDING DEVICES FOR PLANAR ARTICLES
- Publication number 20110211178
- Publication date Sep 1, 2011
- NIKON CORPORATION
- Michael R. Sogard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Liquid jet and recovery system for immersion lithography
- Publication number 20110031416
- Publication date Feb 10, 2011
- Nikon Corporation
- W. Thomas Novak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTERMEDIATE VACUUM SEAL ASSEMBLY FOR SEALING A CHAMBER HOUSING TO...
- Publication number 20100245795
- Publication date Sep 30, 2010
- Fardad A. Hashemi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Control Systems and Methods for Compensating for Effects of a Stage...
- Publication number 20100237819
- Publication date Sep 23, 2010
- Nikon Corporation
- Michael B. Binnard
- G05 - CONTROLLING REGULATING
Information Patent Application
RETICLE ERROR REDUCTION BY COOLING
- Publication number 20100186942
- Publication date Jul 29, 2010
- Alton H. Phillips
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
SHIELD LAYER PLUS REFRIGERATED BACKSIDE COOLING FOR PLANAR MOTORS
- Publication number 20100156198
- Publication date Jun 24, 2010
- Alexander Cooper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Fluid pressure compensation for immersion litography lens
- Publication number 20100149513
- Publication date Jun 17, 2010
- Nikon Corporation
- Douglas C. Watson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, AND MASK
- Publication number 20100097588
- Publication date Apr 22, 2010
- Alton H. Phillips
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM FOR ISOLATING AN EXPOSURE APPARATUS
- Publication number 20100053589
- Publication date Mar 4, 2010
- Fardad A. Hashemi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
High NA Catadioptric Imaging Optics For Imaging A reticle to a Pair...
- Publication number 20100053738
- Publication date Mar 4, 2010
- Nikon Corporation
- David M. Williamson
- G02 - OPTICS

Douglas C. Watson

Person

Patents Grantslast 30 patents

Liquid jet and recovery system for immersion lithography

Cleanup method for optics in immersion lithography using object on...

Environmental system including a transport region for an immersion...

Liquid jet and recovery system for immersion lithography

Orientation independent focus mechanisms for laser radar

Environmental system including a transport region for an immersion...

Vacuum chamber assembly for supporting a workpiece

Mirror assembly for an exposure apparatus

Exposure method and device manufacturing method including selective...

Liquid jet and recovery system for immersion lithography

Reaction assembly for a stage assembly

Multiple-blade holding devices

High heat load optics with vibration isolated hoses in an extreme u...

Control systems and methods for compensating for effects of a stage...

Environmental system including a transport region for an immersion...

Method and apparatus for utilizing in-situ measurements techniques...

Temperature-controlled holding devices for planar articles

High NA catadioptric imaging optics for imaging A reticle to a pair...

System for isolating an exposure apparatus

Self-correcting optical elements for high-thermal-load optical systems

Conforming seats for clamps used in mounting an optical element, an...

Cleanup method for optics in immersion lithography using sonic device

Liquid jet and recovery system for immersion lithography

Environmental system including a transport region for an immersion...

Environmental system including a transport region for an immersion...

Liquid jet and recovery system for immersion lithography

Environmental system including a transport region for an immersion...

Environmental system including a transport region for an immersion...

Stage assembly with lightweight fine stage and low transmissibility

Damper for a stage assembly

Patents Applicationslast 30 patents

LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY

ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION...

LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY

ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION...

LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY

ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION...

LIQUID JET AND RECOVERY SYSTEM FOR IMMERSION LITHOGRAPHY

INTERMITTENT TEMPERATURE CONTROL OF MOVABLE OPTICAL ELEMENTS

ORIENTATION INDEPENDENT FOCUS MECHANISMS FOR LASER RADAR

CLEANUP METHOD FOR OPTICS IN IMMERSION LITHOGRAPHY

MIRROR ASSEMBLY FOR AN EXPOSURE APPARATUS

High Heat Load Optics with Vibration Isolated Hoses in an Extreme U...

VACUUM CHAMBER ASSEMBLY FOR SUPPORTING A WORKPIECE

DAMPER WITH A PLURALITY OF SQUEEZE-FILM DAMPERS ACTING IN PARALLEL

REACTION ASSEMBLY FOR A STAGE ASSEMBLY

MULTIPLE-BLADE HOLDING DEVICES

SYSTEM AND METHOD FOR CONTROLLING THE DISTORTION OF A RETICLE

Method and Apparatus for Utilizing In-Situ Measurements Techniques...

Liquid jet and recovery system for immersion lithography

Environmental system including a transport region for an immersion...

TEMPERATURE-CONTROLLED HOLDING DEVICES FOR PLANAR ARTICLES

Liquid jet and recovery system for immersion lithography

INTERMEDIATE VACUUM SEAL ASSEMBLY FOR SEALING A CHAMBER HOUSING TO...

Control Systems and Methods for Compensating for Effects of a Stage...

RETICLE ERROR REDUCTION BY COOLING

SHIELD LAYER PLUS REFRIGERATED BACKSIDE COOLING FOR PLANAR MOTORS

Fluid pressure compensation for immersion litography lens

EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, AND MASK

SYSTEM FOR ISOLATING AN EXPOSURE APPARATUS

High NA Catadioptric Imaging Optics For Imaging A reticle to a Pair...