Douglas E. Benoit

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Essex Junction, VT, US

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Patents Grantslast 30 patents

Information Patent Grant
Pattern density tailoring for etching of advanced lithographic masks
- Patent number 6,521,383
- Issue date Feb 18, 2003
- International Business Machines Corporation
- Maheswaran Surendra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern density tailoring for etching of advanced lithographic mask
- Patent number 6,365,326
- Issue date Apr 2, 2002
- International Business Machines Corporation
- Maheswaran Surendra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion heating process for substrate temperature uniformity
- Patent number 5,716,763
- Issue date Feb 10, 1998
- International Business Machines Corporation
- Douglas Earl Benoit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Pattern density tailoring for etching of advanced lithographic masks
- Publication number 20020028396
- Publication date Mar 7, 2002
- International Business Machines Corporation
- Maheswaran Surendra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY