Douglas Fowler

Follow

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Temperature control in EUV reticle inspection tool
- Patent number 9,164,388
- Issue date Oct 20, 2015
- KLA-Tencor Corporation
- Frank Chilese
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE CONTROL IN EUV RETICLE INSPECTION TOOL
- Publication number 20130265557
- Publication date Oct 10, 2013
- KLA-Tencor Corporation
- Frank Chilese
- G01 - MEASURING TESTING