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Douglas M. Trickett
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Kudamatsu-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for coating internal surface of plasma processing chamber
Patent number
6,875,477
Issue date
Apr 5, 2005
Hitachi High-Technologies Corporation
Douglas M. Trickett
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method for coating internal surface of plasma processing chamber
Publication number
20050112289
Publication date
May 26, 2005
Douglas M. Trickett
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Method for coating internal surface of plasma processing chamber
Publication number
20050084617
Publication date
Apr 21, 2005
Douglas M. Trickett
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for coating internal surface of plasma processing chamber
Publication number
20040151841
Publication date
Aug 5, 2004
Douglas M. Trickett
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...