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Multi-beam dark field imaging
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Patent number 10,192,716
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Issue date Jan 29, 2019
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KLA-Tencor Corporation
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Doug K. Masnaghetti
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H01 - BASIC ELECTRIC ELEMENTS
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Inspection site preparation
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Patent number 9,165,742
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Issue date Oct 20, 2015
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KLA-Tencor Corporation
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Richard Simmons
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H01 - BASIC ELECTRIC ELEMENTS
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Chamberless substrate handling
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Patent number 7,550,743
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Issue date Jun 23, 2009
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KLA-Tencor Corporation
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Douglas K. Masnaghetti
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H01 - BASIC ELECTRIC ELEMENTS
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Energy filter multiplexing
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Patent number 6,784,425
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Issue date Aug 31, 2004
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KLA-Tencor Technologies Corporation
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Gian Francesco Lorusso
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H01 - BASIC ELECTRIC ELEMENTS
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Scanning electron beam microscope
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Patent number 6,570,154
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Issue date May 27, 2003
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KLA-Tencor Technologies Corporation
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Douglas K. Masnaghetti
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H01 - BASIC ELECTRIC ELEMENTS
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Insulator deposition using focused ion beam
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Patent number 5,700,526
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Issue date Dec 23, 1997
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Schlumberger Technologies Inc.
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Hongyu Ximen
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Self-masking FIB milling
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Patent number 5,616,921
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Issue date Apr 1, 1997
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Schlumberger Technologies Inc.
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Christopher G. Talbot
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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