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Douglas Ratto
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Santa Clara, CA, US
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last 30 patents
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Patent Grant
Tunable multi-zone gas injection system
Patent number
10,403,475
Issue date
Sep 3, 2019
Lam Research Corporation
David J. Cooperberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tunable multi-zone gas injection system
Patent number
9,051,647
Issue date
Jun 9, 2015
Lam Research Corporation
David J. Cooperberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
TUNABLE MULTI-ZONE GAS INJECTION SYSTEM
Publication number
20150235811
Publication date
Aug 20, 2015
LAM RESEARCH CORPORATION
David J. Cooperberg
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
TUNABLE MULTI-ZONE GAS INJECTION SYSTEM
Publication number
20100041238
Publication date
Feb 18, 2010
LAM RESEARCH CORPORATION
David J. Cooperberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Tunable multi-zone gas injection system
Publication number
20030070620
Publication date
Apr 17, 2003
David J. Cooperberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...