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Douglas Thomas Fielder
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Peabody, MA, US
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last 30 patents
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Patent Grant
Technique for uniformity tuning in an ion implanter system
Patent number
7,355,188
Issue date
Apr 8, 2008
Varian Semiconductor Equipment Associates, Inc.
Joseph C. Olson
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Technique for high-efficiency ion implantation
Patent number
7,176,470
Issue date
Feb 13, 2007
Varian Semiconductor Equipment Associates, Inc.
Morgan D. Evans
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Technique for uniformity tuning in an ion implanter system
Publication number
20060284114
Publication date
Dec 21, 2006
Varian Semiconductor Equipment Associates, Inc.
Joseph C. Olson
H01 - BASIC ELECTRIC ELEMENTS